冷阴极气体放电电子束源系统研制  

Development of Gas Discharger Electron Beam Source

作　　者：许海鹰 桑兴华 杨波 彭勇[2] XU Haiying;SANG Xinghua;YANG Bo;PENG Yong(Science and Technology on Power Beam Generator Laboratory,AVIC Manufacturing Technology Institute,Beijing 100024,China;School of Materials Science and Engineering,Nanjing University of Science and Technology,Nanjing 210094,China)

机构地区：[1]中国航空制造技术研究院高能束流发生器实验室,北京100024 [2]南京理工大学材料科学与工程学院,南京210094

出　　处：《航空制造技术》2022年第1期98-105,共8页Aeronautical Manufacturing Technology

基　　金：国家自然科学基金(51775527);国防基础科研计划(JCKY2017205A002);航空科学基金(2018ZE25005)。

摘　　要：基于冷阴极电子发射机理,设计制造了冷阴极气体放电电子枪及其电子光学系统;为了使其能够长期稳定工作,采用三级AC-DC拓扑电路、功率变压器原边并联与输出端整流电路串联获取高压的电路、双闭环控制及放电保护技术等,设计制造了冷阴极气体放电电子枪逆变电源;基于上述技术研制的冷阴极气体放电电子束源实现了-20kV/1500mA束流输出。试验结果表明,惰性气体作为放电气体,长时间工作易出现束流减小现象;以空气作为放电气体,输出表现为低压大电流特性;给定的He、Ar、空气的气流量小于0.03L/min,输出束流随着加速电压增大而增大;给定加速电压不变,He气流量逐渐增大,输出束流随着气流量增大而增大;第3级AC-DC电路中的IGBT全桥逆变电路的输出电压、电流波形一致较好,可以保障冷阴极气体放电电子束源长期稳定工作、大功率输出的需求。Based on cold cathode electron emission mechanism,a gas discharge electron beam(EB)gun and its electron optics system had been designed.In order to meet long time work requirement,three-stage AC-DC topology circuit,the circuit of transformer primary side parallel connection and output rectifier circuit series connection to obtain high voltage,double closed-loop control and discharge protection had been adopted to manufacture a inverter power supply.The output beam current of gas discharge electron beam source,which adopted mentioned above technology,is up to-20kV/1500mA.The experimental results show that,when the inert gas is used as the discharge gas,the electron beam current of the gas discharge EB gun will decrease for a long time.When the air is used as the discharge gas,the output characteristic of low voltage and high current is shown.When airflow rate of He,Ar or air is less than 0.03L/min,the output electron beam current increases with acceleration voltage increased.When the constant acceleration voltage is given,the output beam current increases gradually with the He airflow rate increased.The voltage and current waveforms of IGBT bridges in the third stage AC-DC circuit are well accordance,which will meet the need of long time stable operation and high power output.

关 键 词：气体放电 等离子体 电子束 电子枪 逆变电源 

分 类 号：V242.2[航空宇航科学与技术—飞行器设计]