Laser self-mixing interferometer with scalable fringe precision based on phase multiplication algorithm  

作　　者：WANG Xiulin XIONG Yanbin XU Huizhen QIU Lirong LI Zhen HUANG Wencai 王秀琳;熊彦彬;徐惠真;邱丽镕;李震;黄文财(Department of Physics,Jimei University,Xiamen 361021,China;Department of Electronics Engineering,Xiamen University,Xiamen 361005,China)

机构地区：[1]Department of Physics,Jimei University,Xiamen 361021,China [2]Department of Electronics Engineering,Xiamen University,Xiamen 361005,China

出　　处：《Optoelectronics Letters》2021年第11期665-668,共4页光电子快报（英文版）

基　　金：supported by the Natural Science Foundation of Fujian Province(No.2020J01705);the School Foundation of Jimei University(No.C150345)。

摘　　要：In this paper,we present a phase multiplication algorithm(PMA)to obtain scalable fringe precision in laser self-mixing interferometer under a weak feedback regime.Merely by applying the double angle formula on the self-mixing signal multiple times,the continuously improved fringe precision will be obtained.Theoretical analysis shows that the precision of the fringe could be improved toλ/2^(n+1).The validity of the proposed method is demonstrated by means of simulated SMI signals and confirmed by experiments under different amplitudes.A fringe precision ofλ/128 at a sampling rate of 500 k S/s has been achieved after doing 6 th the PMA.Finally,an amplitude of 50 nm has been proved to be measurable and the absolute error is 3.07 nm,which is within the theoretical error range.The proposed method for vibration measurement has the advantage of high accuracy and reliable without adding any additional optical elements in the optical path,thus it will play an important role in nanoscale measurement field.

关 键 词：Laser self-mixing interferometer with scalable fringe precision based on phase multiplication algorithm 

分 类 号：TH744.3[机械工程—光学工程]