300mm芯片半导体厂废水处理工程分析  

Analysis of Wastewater Treatment Project of 300mm Chip Semiconductor Plant

作　　者：纪桂飞 JI Guifei(Zhejiang Haixin micro Semiconductor Technology Co.,Ltd.,Jiaxing,Zhejiang,314000,China)

机构地区：[1]浙江海芯微半导体科技有限公司,浙江嘉兴314000

出　　处：《工程建设（维泽科技）》2021年第11期126-128,共3页Engineering Construction

摘　　要：近年来国内半导体产业发展态势良好,芯片生产规模不断扩大,但随之出现的就是废水排放以及处理问题。文中以300mm芯片生产废水处理工程为例,根据工程概况,阐述含氟废水、CMP废水、含铜废水的处理工艺,并以此为基础提出改进建议。In recent years,the development trend of domestic semiconductor industry is good,and the chip production scale is expanding,but the problem of wastewater discharge and treatment appears.Taking 300mm chip production wastewater treatment project as an example,according to the general situation of the project,this paper expounds the treatment processes of fluorine-containing wastewater,CMP wastewater and copper-containing wastewater,and puts forward improvement suggestions on this basis.

关 键 词：300mm芯片 半导体厂 废水处理 酸碱废水 

分 类 号：X76[环境科学与工程—环境工程]