石墨烯谐振式微质量传感器研究进展  

Graphene-based Resonators for Micro-mass Sensing

作　　者：肖行 樊尚春[1,2] XIAO Xing;FAN Shangchun(School of Instrumentation Science and Opto-electronics Engineering,Beihang University,Beijing 100191,China;Key Laboratory of Quantum Sensing Technology,Ministry of Industry and Information Technology,Beihang University,Beijing 100191,China)

机构地区：[1]北京航空航天大学仪器科学与光电工程学院,北京100191 [2]北京航空航天大学量子传感技术工信部重点实验室,北京100191

出　　处：《计测技术》2021年第6期1-6,共6页Metrology & Measurement Technology

基　　金：国家自然科学基金资助项目(61773045,61573033,61721091)。

摘　　要：微质量传感器可以用于毒害气体、纳米颗粒的检测,被广泛用于环境检测、医疗诊断等领域。近年来,基于石墨烯材料的微质量传感器因其较大的表面积体积比、低电子噪声、优异的吸附性被广泛研究。本文针对一类基于谐振原理的超高灵敏度石墨烯微质量传感器展开综述,重点论述了石墨烯谐振器的结构、激振拾振方案、质量敏感特性等问题,总结了关于石墨烯谐振式微质量检测的进展及挑战。Micro-mass sensors can be applied to the detection of poisonous gases and nanoparticles,and are widely used in environmental detection,medical diagnosis and other fields.In the past few years,micro-mass sensors based on graphene materials have been extensively studied because of their large surface area to volume ratio,low electronic noise,and excellent adsorption.This article focuses on a type of ultrahigh-sensitivity graphene micro-mass sensor based on the principle of resonance,discusses the structure of graphene resonators,vibration pickup schemes,quality sensitivity characteristics and other issues,and summarizes the progress and the challenges of graphene resonance micromass detection.

关 键 词：微质量 石墨烯 谐振器 传感 

分 类 号：TB9[一般工业技术—计量学] O321[机械工程—测试计量技术及仪器]