液体环境中的光热微驱动方法与技术研究  

Research on optothermal microactuation method and technology in liquid

作　　者：倪凯佳 章海军[1] 尤清扬 张子尧 Ni Kaijia;Zhang Haijun;You Qingyang;Zhang Ziyao(State Key Laboratory of Modern Optical Instrumentation,Zhejiang University,Hangzhou,Zhejiang 310027,China)

机构地区：[1]浙江大学现代光学仪器国家重点实验室,浙江杭州310027

出　　处：《光电工程》2021年第11期11-19,共9页Opto-Electronic Engineering

基　　金：国家自然科学基金资助项目(61540019)。

摘　　要：提出和发展了适用于液体(水)环境的光热微驱动技术及光热微驱动机构(OTMA)。建立了水环境中OTMA膨胀臂在激光照射下的光热膨胀模型,基于有限元分析推导出膨胀臂的温升分布公式,并对长度1080μm、宽度90μm的膨胀臂在4 mW激光照射下的温升分布进行了仿真,理论研究表明了液体环境中光热微驱动技术的可行性。设计与微加工制作了一种对称型OTMA,在波长520 nm、功率可调的激光照射下,首次实现了液体环境中的光热微驱动,实验结果表明膨胀臂的光热偏转量随激光功率的增大而增加。进一步开展了在波长520 nm、有效功率4 mW、频率可调的激光脉冲照射下的光热微驱动实验,结果表明,对称型OTMA在频率0.9 Hz~16.4 Hz的激光脉冲照射下具有良好的动态响应,驱动量(偏转量)振幅在2.6μm~3.7μm之间变化,随激光脉冲频率的增大而减小。理论研究及实验曲线趋势表明,适当增大激光功率、提高激光脉冲频率,在液体环境中实现更大偏转量、更高频率的光热微驱动是完全可行的。本文研究拓展了液体环境中的光热微驱动技术,为微光机电系统及微纳米技术领域的应用提供了新的方法与途径。In this paper,the optothermal microactuation technology and optothermal microactuator(OTMA)suitable for water or other liquids are proposed and developed.The model of optothermal expansion and temperature rise distribution is established,and simulation on a 1080μm long OTMA is conducted,revealing the feasibility of optothermal microactuation technology in water.The optothermal microactuation experiment of a symmetrical OTMA is carried out in water under the irradiation of a laser with a wavelength of 520 nm and adjustable power,revealing that the optothermal deflection increases with the increase of the laser power.Another experiment is carried out under the irradiation of a laser pulse with a wavelength of 520 nm,effective power of 4 mW,and an adjustable frequency,demonstrating that the symmetric OTMA has a good dynamic response under the laser irradiation.The amplitude of the actuating(deflection)amount varies between 2.6μm and 3.7μm when irradiated by the laser pulse with a frequency of 0.9 Hz~16.4 Hz,and it decreases with the increase of the frequency of the laser pulse.The theoretical research and experimental curve trend reveals that it is completely feasible to obtain greater deflection and higher frequency optothermal microactuation in water by appropriately increasing the laser power and laser pulse frequency.This research provides new methods and approaches for the application of micro-opto-electromechanical systems and micro-nano technology.

关 键 词：光热微驱动技术 液体环境 光热膨胀模型 动态响应 偏转量 

分 类 号：O439[机械工程—光学工程] TP211.6[理学—光学]