激光辅助电沉积技术及其在制备功能材料方面的应用  

Laser-assisted Electrodeposition Technology and Its Application in thePreparation of Functional Materials

作　　者：姚峄林 张锦秋 杨培霞 安茂忠 YAO Yilin;ZHANG Jinqiu;YANG Peixia;AN Maozhong(Key Laboratory of Critical Materials Technology for New Energy Conversion and Storage,Ministry of Industry and Information Technology,School of Chemistry and Chemical Engineering,Harbin Institute of Technology,Harbin 150001,China)

机构地区：[1]哈尔滨工业大学化工与化学学院,新能源转换与储存关键材料技术工业和信息化部重点实验室,哈尔滨150001

出　　处：《材料导报》2022年第3期191-199,共9页Materials Reports

摘　　要：电沉积是改善金属基材性能的主要方法之一,但目前单一的沉积技术已经无法满足功能材料制备等方面的诸多要求,故研发了许多新技术来克服常规沉积过程所引起的镀层缺陷。激光辅助电沉积(LAED)是一种在电沉积系统中引入激光辐照以实现高速、高质量和高选择性沉积的技术。与传统电沉积过程相比,LAED技术具有辐照区域沉积速度快、可定域沉积及促进纳米结构形成等优势。虽然目前对LAED技术的研究多以其作用机制为主,但由于激光与电沉积共同作用的过程较为复杂,对其作用机制的研究仍不够系统;且激光设备较为昂贵,沉积装置也需要特定的设计。这些因素导致该技术工艺体系不够完善、应用范围有限。随着小型、高性能激光器和各类监测手段的发展,该技术会有更多的优势和更广泛的应用。本文综述了LAED技术的作用机制及装置组成,从激光在溶液中的作用、LAED沉积过程和激光与电沉积协同作用三方面对作用机制进行分析,发现不同实验条件会对沉积物质的结构和形态产生较大的影响,故通过调节激光辐照系统与电沉积系统的相关工艺参数可得到具有不同性能的镀层。激光辅助电沉积技术的代表性应用是制备无掩膜微图案、高质量镀层及各类微结构功能材料。本文期望为LAED技术的装置设计及其在各类功能材料方面的应用提供一定参考。Electrodeposition is one of the main methods to improve the performance of metal substrates,but currently the single deposition technology can no longer meet many requirements of functional materials preparation.So many new technologies have been developed to overcome the coating defects caused by conventional deposition processes.Laser-assisted electrodeposition(LAED)is a technology that introduces laser irradiation in an electrodeposition system to achieve high-speed,high-quality,and highly selective deposition.Compared with the traditional electrodeposition process,LAED technology has the advantages of fast deposition speed in the irradiated area,localized deposition and promotion of the formation of nanostructure.Although the current research on LAED technology is mostly based on the mechanism of action,the study on the mechanism of action is still not systematic due to the complicated process of laser and electrodeposition.Moreover,the laser equipment is relatively expensive and the deposition device requires a specific design.All of these lead to the incomplete process system of the technology and the limited application range.With the development of small high-performance lasers and various monitoring methods,this technology will have more advantages and wider applications.This paper summarizes the mechanism of LAED technology and the composition of the device.It analyzes the mechanism of action from three aspects which are the role of laser in solution,the deposition process of LAED and the synergistic effect of laser and electrodeposition.Different experimental conditions will greatly affect the deposition material.Therefore,by adjusting the relevant process parameters of the laser irradiation system and the electrodeposition system,coatings with different properties can be obtained.The representative applications of laser-assisted electrodeposition technology are mainly the preparation of maskless micropatterns,high-quality coatings and various types of microstructured functio-nal materials.This paper h

关 键 词：激光辅助 电沉积 作用机制 微结构 功能材料 

分 类 号：TG174.441[金属学及工艺—金属表面处理]