涂层材料激光剥蚀电感耦合等离子体质谱深度剖析进展  

Advances on in-depth profile of coated materials by laser ablation inductively coupled plasma mass spectrometry

作　　者：胡圣虹[1] 张鼎文 张丽萍[1,2] 靳兰兰 郭伟[1] HU Shenghong;ZHANG Dingwen;ZHANG Liping;JIN Lanlan;GUO Wei(China University of Geosciences,State Key Laboratory of Biogeology and Environmental Geology,School of Earth Sciences,Wuhan 430074,China;Zhengzhou Institute of Multipurpose Utilization of Mineral Resources,CAGS,Zhengzhou 450006,China)

机构地区：[1]中国地质大学(武汉)生物地质与环境地质国家重点实验室,地球科学学院,湖北武汉430074 [2]中国地质科学院郑州矿产综合利用研究所,河南郑州450006

出　　处：《冶金分析》2021年第12期39-49,共11页Metallurgical Analysis

基　　金：国家自然科学基金(41773013);国家重点研发计划(2017YFD0800300)。

摘　　要：不同组成和厚度的涂层材料能够满足使用均质材料不能满足的关键需求,因而受到了越来越多的关注,因此需要发展一种快速准确的深度剖析技术以对涂层材料的元素组成和分布情况进行表征。文章主要介绍了激光剥蚀电感耦合等离子体质谱(Laser ablation inductively coupled plasma mass spectrometry, LA-ICP-MS)深度剖析技术,详细阐述了LA-ICP-MS深度剖析技术的基本原理、相较于其他分析技术的优势和深度分辨率的计算方法,总结了激光剥蚀参数、涂层材料厚度和剥蚀池的几何形状这3个方面对多层涂层材料深度剖析和深度分辨率的影响,介绍了LA-ICP-MS深度剖析技术在陶瓷涂层、金属镀层材料、玻璃和聚合物涂层分析中的应用实效。The coating materials with different composition and thickness could meet the key requirements that could not be met by the homogeneous materials, and have attracted more and more attention. Therefore, it was necessary to develop a technology for the rapid and accurate depth profile analysis to characterize the elemental composition and distribution of coating materials. It was focused on the depth profile analysis by laser ablation inductively coupled plasma mass spectrometry(LA-ICP-MS). The fundamental principle of depth profile analysis by LA-ICP-MS, the advantages compared to other analysis techniques, and the calculation methods of depth resolution were elaborated. The influence of laser ablation parameter, the coating thickness, and the geometrical shape of ablation cell on the depth profile analysis and depth resolution of multilayer coating materials were summarized. The application effects of depth profile analysis by LA-ICP-MS in analysis of ceramic coating, metal coating material, glass and polymer coating were introduced.

关 键 词：激光剥蚀电感耦合等离子体质谱(LA-ICP-MS) 深度剖析 深度分辨率 剥蚀池 涂层材料 

分 类 号：O657.31[理学—分析化学] TF03.1[理学—化学]