基于羟基磷灰石的QCM湿度传感器研究  

QCM based humidity sensor modified with hydroxyapatite

作　　者：沈兵 徐甲强[1] 王炉煜 陈杨 SHEN Bing;XU Jiaqiang;WANG Luyu;CHEN Yang(College of Sciences,Shanghai University,Shanghai 200444,China;Shanghai Yaolu Instrument&Equipment Co.,Ltd,Shanghai 200444,China)

机构地区：[1]上海大学理学院,上海200444 [2]上海摇橹仪器有限设备有限公司,上海200444

出　　处：《电子元件与材料》2022年第1期53-58,共6页Electronic Components And Materials

基　　金：国家重点研发计划(2020YFB2008600)。

摘　　要：随着物联网信息化技术的发展,湿度传感器检测精度的要求越来越高,研究具有更好湿敏特性的材料变得日益重要。采用溶胶凝胶法制备了一种具有均匀棒状结构、绿色无毒的羟基磷灰石纳米材料,并将其负载在石英晶体微天平(QCM)上,构筑了高稳定性和敏感性的湿度传感器。通过测量QCM的共振频移,研究了所构筑传感器的湿敏特性,其共振频移源于水分子氢键吸附所引发的附加质量负载变化。检测结果显示,该传感器能在11%~97%相对湿度范围内完成湿度检测,且灵敏度高(20.16 Hz/RH)、响应时间短(12 s)、重现性好。研究成果在制造绿色无毒高灵敏性的湿度传感器方面具有一定应用价值。With the development of internet of things information technology,the accuracy requirement of the humidity detection becomes increasingly strict.It is important to investigate the materials with better moisture-sensitivity.In this work,the green and non-toxic hydroxyapatite nanomaterial with homogeneous rod-like structure was prepared by sol-gel method and loaded on the Quartz Crystal Microbalance(QCM)to construct the humidity sensor with high stability and sensitivity.The moisture-sensitive characteristics of the constructed sensor were investigated by measuring the resonance frequency shift of the QCM,which originated from the additional mass loading changes triggered by the hydrogen bonding adsorption of water molecules.The test results show that the sensor could detect the relative humidity in the range of 11%-97%with high sensitivity(20.16 Hz/RH),short response time(12 s)and good reproducibility.This research have certain application value in the fabrication of green,non-toxic,and high sensitivity humidity sensor.

关 键 词：羟基磷灰石 石英晶体微天平 溶胶凝胶法 湿敏特性 检测精度 

分 类 号：TP212.2[自动化与计算机技术—检测技术与自动化装置]