Evaluation System and Correlation Analysis for Determining the Performance of a Semiconductor Manufacturing System  

作　　者：Qingyun Yu Li Li Hui Zhao Ying Liu Kuo-Yi Lin 

机构地区：[1]Department of Control Science and Engineering,College of Electronics and Information Engineering,Shanghai Institute of Intelligent Science and Technology,and also with Shanghai Research Institute for Intelligent Autonomous Systems,Tongji University,Shanghai 201804,China [2]Department of Mechanical Engineering,School of Engineering,Cardiff University,The Parade,CF243AA,UK

出　　处：《Complex System Modeling and Simulation》2021年第3期218-231,共14页复杂系统建模与仿真（英文）

摘　　要：Numerous performance indicators exist for semiconductor manufacturing systems.Several studies have been conducted regarding the performance optimization of semiconductor manufacturing systems.However,because of the complex manufacturing processes,potential complementary or inhibitory correlations may exist among performance indicators,which are difficult to demonstrate specifically.To analyze the correlation between the performance indicators,this study proposes a performance evaluation system based on the mathematical significance of each performance indicator to design statistical schemes.Several samples can be obtained by conducting simulation experiments through the performance evaluation system.The Pearson correlation coefficient method and canonical correlation analysis are used on the received samples to analyze linear correlations between the performance indicators.Through the investigation,we found that linear and other complex correlations exist between the performance indicators.This finding can contribute to our future studies regarding performance optimization for the scheduling problems of semiconductor manufacturing.

关 键 词：semiconductor manufacturing system system modeling evaluation system correlation analysis 

分 类 号：TN9[电子电信—信息与通信工程]