不同光栅对光束整形效果的影响分析  

Analyzing the Characteristics of Different Gratings in Beam Shaping with SLM

作　　者：杨光远[1] 杨俊鹏[1] 彭三文 韩磊[1] 张艺 汪于涛 翟中生[2] Yang Guangyuan;Yang Junpeng;Peng Sanwen;Han Lei;Zhang Yi;Wang Yutao;Zhai Zhongsheng(China Tobacco Hubei Industrial LLC,Wuhan,Hubei 430050,China;School of Mechanical and Engineering,Hubei University of Technology,Wuhan,Hubei 430068,China;Shanghai Institute of Laser Technology,Shanghai Key Lab of Laser Beam Micro Processing,Shanghai 200233,China)

机构地区：[1]湖北中烟工业有限责任公司,湖北武汉430050 [2]湖北工业大学机械工程学院,湖北武汉430068 [3]上海市激光技术研究所,上海市激光束精细加工重点实验室,上海200233

出　　处：《应用激光》2021年第6期1328-1333,共6页Applied Laser

摘　　要：在介绍SLM进行光束整形原理的基础上,分析了二元光栅、闪耀光栅和正弦光栅三种光栅的结构特性,并根据影响整形光束质量的性能指标,以方向光斑为例,设计了不同周期的相位掩模图。成像和加工试验表明,SLM上加载三种光栅形成的掩模图,均可以将高斯分布的圆形光斑整形为平顶的方形光斑,但闪耀光栅的整形效果明显优于另外两种光栅。在闪耀光栅周期为120μm时,局部能量利用率达到91.86%,均方根误差为0.039,整形后光束具有较好的均匀性。Based on the principle of SLM beam shaping,the structural characteristics of three type grating:binary grating,blazed grating and sinusoidal grating are analyzed.Phase masks with different periods of the three type gratings are designed according to the performance that affect the quality of shaping beam,taking square form as an example.Imaging and machined experiments show that all the phase mask formed by loading three type gratings on SLM can shape the gaussian circular beam into a flat-topped square,but the shaping effect of blazed gratings is obviously better than that of the other two gratings.When the grating period was 120μm,the local energy utilization rate was 91.86%,and the RMSE was 0.039.Using blazed grating,the shaped beam has high energy efficiency and good uniformity.

关 键 词：光束整形 二元光栅 闪耀光栅 正弦光栅 

分 类 号：TN249[电子电信—物理电子学]