微电子组装烘焙设备监控系统的抗干扰设计  

Anti-Interference Design of Monitoring System for Microelectronic Assembly Baking Equipment

作　　者：袁家军 莫贵涛 李杰[1] YUAN Jiajun;MO Guitao;LI Jie(The 24th Research Institute of China Electronics Technology Group Corporation,Chongqing 400060,P.R.China)

机构地区：[1]中国电子科技集团公司第二十四研究所,重庆400060

出　　处：《微电子学》2021年第6期900-904,共5页Microelectronics

摘　　要：微电子组装工艺会使用多台烘焙设备,对设备实施一体化监控,以提升工艺效率、提高质量控制水平和设备运行安全水平。监控系统采用RS485通信,可编程控制器(PLC)现场采集数据和实施控制,计算机作为上位机进行监控和数据信息处理。监控系统运行于复杂的工业现场,电磁干扰严重,易造成监控系统数据错误、误报警,甚至系统失效。一体化监控系统需进行抗干扰设计,其分析和设计是一个难点。文章针对多台烘焙设备工艺运行特点,采取抗干扰强的RS485通信、强弱电分开布线等硬件抗干扰设计。提供了一种简单的工艺阶段分类处理方法的软件抗干扰设计,实现了微组装多提烘焙设备一体化监控系统的稳定运行。Multiple baking equipment would be used in the microelectronic assemble process to implement the integrated monitoring of the equipment,which could improve the process efficiency,quality control level and the safety level of equipment operation.In the monitoring system,RS485 communication was adopted,PLC collected data and controlled on site,and the computer was used as the upper computer for monitoring and data information processing.The monitoring system operated in a complex industrial site with serious electromagnetic interference,which was easy to cause data errors,false alarm and even system paralysis.The anti-interference design should be carried out in the design of integrated monitoring system,and its analysis and design was a difficult point.According to the characteristics of process operation of a few baking equipment,hardware anti-interference design such as RS485 communication with strong anti-interference and separately wiring of electrics and electronics was adopted in this paper.A anti-interference design software based on the simple process stage classification processing method was provided,thus the stable operation of the integrated monitoring system of multiple baking equipment for micro-assembly had been realized.

关 键 词：监控系统 PLC 抗干扰 RS485 烘焙设备 

分 类 号：TN605[电子电信—电路与系统]