铌酸锂薄膜调制器的研究进展  

Research progress of lithium niobate thin-film modulators

作　　者：刘海锋 郭宏杰 谭满清[1,2] 李智勇 LIU Hai-feng;GUO Hong-jie;TAN Man-qing;LI Zhi-yong(State Key Laboratory of Integrated Optoelectronics,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China;College of Materials Science and Opto-electronics Technology,University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]中国科学院半导体研究所集成光电子学国家重点实验室,北京100083 [2]中国科学院大学材料科学与光电技术学院,北京100049

出　　处：《中国光学》2022年第1期1-13,共13页Chinese Optics

基　　金：国家重点研发计划(No.2019YFB2203802);国家自然科学基金资助项目(No.61934007)。

摘　　要：铌酸锂薄膜调制器具有体积小、带宽高、半波电压低的优点,在光纤通讯和光纤传感领域具有重要应用价值,是近年来的研究热点。本文梳理了铌酸锂薄膜调制器的波导结构、耦合结构、电极结构的研究进展,总结了LN薄膜波导的制备工艺,并深入分析了不同结构调制器的性能。基于SOI和LNOI结构,薄膜调制器实现了V_(π)L<2 V∙cm,双锥形耦合方案实现了耦合损耗<0.5 dB/facet,行波电极结构实现了调制带宽>100 GHz。铌酸锂薄膜调制器的性能在大多数方面优于目前商用铌酸锂调制器,随着波导工艺进一步提升,将成为铌酸锂调制器的热门方案。最后对铌酸锂薄膜调制器的发展趋势和应用前景进行了展望。Electro-optic modulators based on lithium niobate(LiNbO_(3),LN)thin-film platforms are advantageous for their small volume,high bandwidth and low half-wave voltage.They have important application prospects in the field of optical fiber communication and optical fiber sensing,and thus have became a heavily researched topic in recent years.In this paper,the research progress of the waveguide structures,coupling structures and electrode structures of LN thin-film modulators are reviewed in detail.The fabrication process of a LN thin-film waveguide is summarized,and the performances of different modulator structures are analyzed.Based on SOI and LNOI,a platform modulator is realized with V_(π)L<2 V∙cm,a bilayer inversely tapered coupling scheme achieves a coupling loss<0.5 dB/facet,and a traveling wave electrode structure achieves a modulation bandwidth>100 GHz.Thin-film LN modulators are better than commercial LN modulators in most aspects.It can be predicted that in the near future,with the further improvement in waveguide technology,thin-film LN will become a popular scheme of LN modulators.Finally,the potential directions for the future of their research are proposed.

关 键 词：铌酸锂薄膜 LNOI 电光调制器 

分 类 号：TN29[电子电信—物理电子学]