热电堆型激光功率计设计与仿真  

Design and Simulation of Thermopile Laser Power Meter

作　　者：雷程[1] 武学占 梁庭[1] 马野 关一浩 董志超 李强 齐蕾 LEI Cheng;WU Xuezhan;LIANG Ting;MA Ye;GUANG Yihao;DONG Zhichao;LI Qiang;QI Lei(Key Laboratory of Instrumentation Science&Dynamic Measurement of Ministry of Education,North University of China,Taiyuan 030051,China;North Automatic Control Technology Institute,Taiyuan 030006,China)

机构地区：[1]中北大学仪器科学与动态测试教育部重点实验室,山西太原030051 [2]北方自动控制技术研究所,山西太原030006

出　　处：《红外技术》2022年第2期157-162,共6页Infrared Technology

基　　金：中央引导地方科技发展资金(YDZX20201400001664);山西省自然科学基金项目(201801D221203);高等学校科技创新项目(1810600108MZ)。

摘　　要：针对紫外、可见、红外等激光器输出功率测试需求,提出一种由传热体、吸收层、绝缘层和热电偶构成的热电堆型激光功率计。结合热效应和塞贝克效应理论,采用Solidworks三维设计软件构建不同关键结构尺寸的模型,通过ANSYS Workbench仿真软件建立了热电耦合仿真分析模型,分析关键结构尺寸参数对输出电压以及温度分布的影响关系。采用机械加工、镀膜和喷砂工艺设计热电堆型激光功率计,设计封装结构和电路补偿对输出电压进行放大和校准,结果表明,传热体厚度、热偶条对数和长度都是影响激光功率计输出电压的关键性因素。To address the need to test the output power of ultraviolet,visible,and infrared lasers,this study proposes a thermopile laser power meter composed of a heat transfer body,an absorption layer,an insulating layer,and a thermocouple.Combining the thermal effect and Seebeck effect theory,Solidworks 3 D design software is used to build models of different key structure sizes,and a thermoelectric coupling simulation analysis model is established using ANSYS Workbench simulation software to analyze the influence of key structure size parameters on the output voltage and temperature distribution.The thermopile laser power meter is designed using mechanical processing,coating,and sandblasting,and the package structure and circuit compensation are designed to amplify and calibrate the output voltage.The results show that the key factors affecting the output voltage of the laser power meter are the thickness of the heat transfer body,the number of thermal couples,and the length of the thermal couple.

关 键 词：激光功率计 热效应 塞贝克效应 热电堆 热电偶 有限元仿真分析 

分 类 号：TM933.3[电气工程—电力电子与电力传动]