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作 者:张梦慧 黄新放 韩旭 张人升 乔洲 李庆宁 燕峰[1] 冯永军[1] 解志文 ZHANG Menghui;HUANG Xinfang;HAN Xu;ZHANG Rensheng;Qiao Zhou;LI Qingning;YAN Feng;FENG Yongjun;XIE Zhiwen(School of Mechanical Engineering and Automation,University of Science and Technology Liaoning,Liaoning 114051,China)
机构地区:[1]辽宁科技大学机械工程与自动化学院,辽宁114051
出 处:《真空科学与技术学报》2021年第12期1178-1183,共6页Chinese Journal of Vacuum Science and Technology
基 金:国家自然科学基金项目(51771087;52171076);辽宁科技大学创新训练项目(S202010146003);辽宁科技大学教学改革项目(XJGBZ202014)。
摘 要:本文探究了Cr过渡层及Cr-CrN过渡层对CrWN涂层耐磨性能的影响,制备具有良好的减磨耐磨性能的CrWN涂层。采用等离子增强磁控溅射工艺,在碳化钨基体表面制备CrWN涂层,Cr-CrWN涂层、Cr-CrN-CrWN涂层。通过扫描电子显微镜,X射线光电子能谱仪,X射线衍射仪,纳米压痕仪,洛氏硬度计和摩擦磨损实验机对涂层表面形貌、力学性能及摩擦磨损性能进行表征及分析。三种CrWN涂层均以面心立方结构的CrN相和W2N相构成。Cr-CrN-CrWN涂层的膜基结合强度最高,为HF1等级。CrWN涂层的硬度为21.5 GPa,引入Cr过渡层及Cr-CrN过渡层均未对涂层硬度及弹性模量造成显著影响。但通过摩擦磨损实验结果表明Cr过渡层及Cr-CrN过渡层均可降低涂层的摩擦系数并提高涂层的耐磨损性能,在稳定摩擦阶段CrCrWN涂层和Cr-CrN-CrWN涂层的摩擦系数分别为0.656,0.703,磨损率分别为1.366×10^(-6)mm^(3)/(N·m)、1.247×10^(-6)mm^(3)/(N·m);且磨损后磨痕表面无犁沟及裂纹,涂层未出现明显剥落。因此,Cr过渡层及Cr-CrN梯度过渡层可改善CrWN涂层的摩擦学性能及结合强度,并提高涂层的耐磨损性能。This work investigates the effects of Cr and Cr-CrN transition layer on the wear resistance of CrWN coating and prepares CrWN coating with excellent wear resistance.CrWN coating,Cr-CrWN coating and Cr-CrNCrWN coating are deposited on tungsten carbide substrates using plasma enhanced magnetron sputtering.The surface morphology,mechanical and tribological properties of the coating are analyzed by scanning electron microscopy(SEM),X-ray photoelectron spectroscopy(XPS),X-ray diffraction(XRD),Nano-indentation,Rockwell hardness tester and friction tester.The coatings are composed of face-centered cubic CrN and W2 N phases.Cr-CrNCrWN coating has the highest adhesion strength of coating substrate,which is HF1 grade.The hardness of CrWN coating is 21.5 GPa.The introduction of Cr transition layer and Cr-CrN transition layer did not significantly affect the hardness and elastic modulus of the coating.However,Cr transition layer and Cr-CrN transition layer can reduce the friction coefficient and improve the wear resistance of the coating.The friction coefficient of the coatings is 0.656 and 0.703,and the wear rate is 1.366×10^(-6)mm^(3)/(N·m)and 1.247×10^(-6)mm^(3)/(N·m)respectively in stable friction stage.Moreover,no furrows and cracks on the surface and no obvious spalling of the coating are found after wear.Therefore,the introduction of Cr transition layer and Cr-CrN transition layer can improve the adhesion of the coating/substrate and the wear resistance of the coating.
关 键 词:CrWN涂层 梯度过渡层 摩擦学性能 等离子增强磁控溅射
分 类 号:TB34[一般工业技术—材料科学与工程]
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