利用PDMS纳米结构薄膜增强玻璃基板出光  

Light Extraction Enhancement of Glass Substrate by PDMS Nano-Structured Films

作　　者：李晨冉 王书杰[2] 涂于飞[2] Li Chenran;Wang Shujie;Tu Yufei(Puyang Petrochemical College,Puyang 457001,China;Key Laboratory of Special Functional Materials,Henan University,Kaifeng 475000,China)

机构地区：[1]濮阳石油化工职业技术学院,河南濮阳457001 [2]河南大学特种功能材料重点实验室,河南开封475000

出　　处：《微纳电子技术》2022年第2期140-144,共5页Micronanoelectronic Technology

摘　　要：以纳米压印技术为基础制备了具有纳米结构的聚二甲基硅氧烷(PDMS)薄膜。将纳米结构中间聚合物模板(IPS)薄膜覆盖在有PDMS溶液的玻璃基板上,真空加热后在玻璃基板上得到PDMS网格结构薄膜。这种方式得到的网格结构形状保持较好且厚度均匀无气泡,IPS薄膜不仅可以反复使用以减少Si母版的材料损耗,还可以缩短网格结构的制备时间。快速傅里叶变换(FFT)表明网格结构在可视角度下不存在角度依赖性。最后,利用时域有限差分(FDTD)对有无PDMS纳米结构的基板性能进行模拟,结合实验结果分析有无网格纳米结构对基板性能的影响,证明了网格结构适合作为介质散射层使用。Nano-structured polydimethylsiloxane(PDMS)films were fabricated by nano imprin-ting technology.The nano-structured inter-mediate polymer stamp(IPS)film was coated on the glass substrate with the PDMS solution,and then the PDMS grid structure film was obtained on the glass substrate after vacuum heating.The grid structure obtained in this way retains good shape and has uniform thickness without bubbles.The IPS film can be used repeatedly to reduce the material loss of Si master plate and shorten the preparation time of the grid structure.The fast Fourier transform(FFT)shows that the grid structure has angle independence in the visible angles.Finally,finite-difference time-domain(FDTD)was used to simulate the performance of the substrate with or without the PDMS nano-structure.Combined with the experimental results,the influence of the nano-structure with and without grids on the substrate performance was analyzed.It is proved that the grid structure is suitable to be used as a dielectric scattering layer.

关 键 词：聚二甲基硅氧烷(PDMS) 纳米压印技术 中间聚合物模板(IPS) 快速傅里叶变换(FFT) 时域有限差分(FDTD) 

分 类 号：TB383[一般工业技术—材料科学与工程]