微悬臂梁传感系统在CNT微热量检测中的应用  

Application of Microcantilever Sensing System in CNTs Micro Heat Detection

作　　者：滕艳华[1] 王启明 周宁鸿 冯贺 刘松[1] 薛长国[1] Teng Yanhua;Wang Qiming;Zhou Ninghong;Feng He;Liu Song;Xue Changguo(School of Materials Science and Engineering,Anhui University of Science and Technology,Huainan 232001,China)

机构地区：[1]安徽理工大学材料科学与工程学院,安徽淮南232001

出　　处：《微纳电子技术》2022年第2期175-179,共5页Micronanoelectronic Technology

基　　金：国家自然科学基金资助项目(11872001);安徽省自然科学杰出青年科学基金资助项目(1808085J30);安徽省重点研究与开发计划项目(202004h07020026);安徽省留学回国人员创新项目。

摘　　要：针对碳纳米管(CNT)微热量检测不易的问题,采用了一种基于微悬臂梁传感器的CNT微热量检测系统进行检测。通过光杠杆检测法测量微悬臂梁弯曲量,从而实现微悬臂梁对CNT的微热量检测,研究了CNT光热转换散发热量对微悬臂梁挠度的影响。用最小二乘法拟合出CNT薄膜温度变化与相应微悬臂梁偏移量关系。结果显示,温度变化与微悬臂梁偏移量呈线性关系,与理论分析符合,且面积约0.07 mm^(2)的样品薄膜拟合曲线的线性相关系数为0.9932。通过对温度检测的重复性实验,验证了系统具有较高的稳定性;将温度测量值与实验系统的拟合值进行对比,结果基本一致,验证了系统的可靠性。Aiming at the difficult problem of carbon nanotubes(CNTs)micro heat detection,a CNTs micro heat detection system based on microcantilever beam sensors was used for detection.The bending amount of the microcantilever was measured by the optical lever detection method,so as to realize the micro heat detection of the microcantilever to the CNTs,and the influence of the heat emitted by the photothermal conversion of CNTs on the deflection of the microcantilever was studied.The least square method was used to fit the relationship between the temperature change of the CNTs film and the offset of the corresponding microcantilever.The results show that the relationship between the temperature change and the offset of the microcantilever are linear,which is consistent with the theoretical analysis.And the linear correlation coefficient of the fitting curve of the sample film with the area of about 0.07 mm^(2)is 0.9932.The repeatability test of temperature detection verifies that the system has higher stability.The temperature mea-surement value was compared with the fitting value of the experimental system,and the results are basically the same,which verifies the reliability of the system.

关 键 词：微悬臂梁 碳纳米管(CNT) 传感器 温度检测 光热光谱 

分 类 号：TP212.9[自动化与计算机技术—检测技术与自动化装置]