硅粉氮化制备氮化硅的机理研究进展  

Research Progress on the Mechanism of Preparing Silicon Nitride with Nitriding Silicon Powder

作　　者：王丽娟 邢鹏飞 庄艳歆 金星 徐宏利 WANG Lijuan;XING Pengfei;ZHUANG Yanxin;JIN Xing;XU Hongli(Key Laboratory of Electromagnetic Processing of Materials(Ministry of Education),Northeastern University,Shenyang 110000,Liaoning,China;School of Metallurgy,Northeastern University,Shenyang 110000,Liaoning,China)

机构地区：[1]东北大学材料电磁过程研究教育部重点实验室,辽宁沈阳110000 [2]东北大学冶金学院,辽宁沈阳110000

出　　处：《中国陶瓷工业》2022年第1期18-25,共8页China Ceramic Industry

基　　金：国家自然科学基金(2197080510)。

摘　　要：氮化硅(Si_(3)N_(4))因具有耐高温、耐磨损、耐腐蚀、抗热震、抗氧化等优良性能,广泛应用于热交换器轴承、高温组件、发动机和燃气轮机等。氮化硅的制备方式有多种,目前工业大规模生产氮化硅最常用的是硅粉直接氮化。氮化硅具有α和β两种晶型,其中:α-Si_(3)N_(4)是低温亚稳定相;β-Si_(3)N_(4)是高温稳定相。因为α相和β相Si_(3)N_(4)以独立的机理形成,它们有各自的形成阶段和动力学定律。所以,此过程中温度、时间、添加剂等变量,会对α相和β相的含量造成不同程度的影响。该文献总结分析了硅粉直接氮化中各种变量对α-Si_(3)N_(4)和β-Si_(3)N_(4)形成机理的影响,并对其未来的研究方向进行了展望。Si_(3)N_(4)is widely used in heat exchanger bearing,high-temperature assembly,engines and gas turbines due to its excellent performance of high temperature resistance,wear resistance,corrosion resistance,thermal shock resistance and oxidation resistance.Si_(3)N_(4)can be prepared in a number of ways.At present,direct nitriding of Silicon powder is the most commonly used method in industrial mass production of Silicon Nitride.Of two crystal forms Si_(3)N_(4)has,α-Si_(3)N_(4)is low temperature metastable phase and β-Si_(3)N_(4)is high temperature stable phase.Sinceαphase andβ-phase Si_(3)N_(4)are formed by independent mechanism,and they have their own formation stages and kinetic laws,many variables,such as temperature and time additives,will affect the content ofαand β-phase to varying degrees during this process.In this paper,the influence mechanism of various variables on the formation of α-Si_(3)N_(4)andβ-Si_(3)N_(4)in direct Nitride of Silicon powder is summarized and analyzed,and the research direction is prospected.

关 键 词：硅粉直接氮化 氮化温度 Si_(3)N_(4)稀释剂 金属催化剂 氧化物添加剂 

分 类 号：TQ174.79[化学工程—陶瓷工业]