基于聚二甲基硅氧烷微米结构的柔性单电极摩擦纳米发电机  

Flexible Single-Electrode Triboelectric Nanogenerator Based on Polydimethylsiloxane Microstructures

作　　者：张满 山程 夏良平 党随虎 曾梦婷 杜春雷 Zhang Man;Shan Cheng;Xia Liangping;Dang Suihu;Zeng Mengting;Du Chunlei(Key Laboratory of Micro Nano Optoelectronic Devices and Intelligent Perception Systems,School of Electronic Information Engineering,Yangtze Normal University,Chongqing 408100,China;College of Physical Science and Technology,Sichuan University,Chengdu 610064,China;School of Electronic&Information Engineering,Chongqing Three Gorges University,Chongqing 404199,China)

机构地区：[1]长江师范学院电子信息工程学院微纳光电器件与智能感知系统重点实验室,重庆408100 [2]四川大学物理科学与技术学院,成都610064 [3]重庆三峡学院电子与信息工程学院,重庆404199

出　　处：《微纳电子技术》2022年第1期44-49,共6页Micronanoelectronic Technology

基　　金：国家自然科学基金资助项目(61775213);重庆市自然科学基金面上项目(cstc2019jcyj-msxmX0352,cstc2019jcyj-msxmX0878);页岩气光纤智能感知技术创新群体项目(CXQT20027);重庆市教委项目(KJCX2020049)。

摘　　要：摩擦纳米发电机已经广泛用于日常生活中收集各种机械能并转换为电能,作为触摸屏和智能皮肤技术的自供能传感系统。为了提高能量转换效率,设计了一种单电极的摩擦纳米发电机(S-TENG)。将表面含有微米尺度浮雕结构的聚二甲基硅氧烷(PDMS)作为S-TENG的摩擦层,一层厚度为20 nm的铟锡氧化物膜作为电极层,通过外部电路可以输出电能。微米尺度浮雕结构增强了摩擦层的电学性能。在室温下使用示波器通过施加不同的外部压力检测了S-TENG的开路电压和短路电流。测试结果表明,制备的S-TENG的开路电压达到了80 V,短路电流达到了1μA。The triboelectric nanogenerator has been widely used in daily life to collect various mechanical energies and convert them into electrical energy,as a self-powered sensing system for touch screen and smart skin technology.To improve the energy conversion efficiency,a single-electrode triboelectric nanogenerator(S-TENG)was designed.A polydimethylsiloxane(PDMS)film with micro-relief surface structure was used as the friction layer of the S-TENG,and an indium tin oxide film with a thickness of 20 nm was used as the electrode layer,the electrical energy could output through an external circuit.The micro-relief structure enhances the electrical performance of the friction layer.An oscilloscope was used to detect the open-circuit voltage and short-circuit current of the S-TENG by applying different external pressures at room temperature.The test results show that the open-circuit voltage and short-circuit current of the prepared S-TENG reaches 80 V and 1μA,respectively.

关 键 词：摩擦纳米发电机(TENG) 聚二甲基硅氧烷(PDMS) 微米结构 浮雕结构 传感系统 

分 类 号：TM919[电气工程—电力电子与电力传动]