基于MEMS工艺的压电驱动的可变形反射微镜  

Deformable Reflection Micromirror with Piezoelectric Actuation Based on MEMS Process

作　　者：王一 王欢 李以贵 Wang Yi;Wang Huan;Li Yigui(School of Science,Shanghai Institute of Technology,Shanghai 201418,China)

机构地区：[1]上海应用技术大学理学院,上海201418

出　　处：《微纳电子技术》2022年第1期66-73,共8页Micronanoelectronic Technology

基　　金：国家自然科学基金资助项目(51035005);上海市农委重点项目(沪农科创字(2018)第3-3号)。

摘　　要：可变形反射镜作为自适应光学系统的核心部件,通过与微电子机械系统(MEMS)技术的结合向微型化、集成化的方向发展。基于压电材料的逆压电效应,设计并制备了一种压电驱动的可变形反射微镜,可通过电信号的控制实现微镜的驱动控制。设计的可变形反射微镜由硅镜片、锆钛酸铅(PZT)驱动器和玻璃基板三部分结构组成。利用有限元仿真软件对硅镜片的结构进行了优化。采用物理气相沉积、紫外光刻、共晶键合、机械切割和深反应离子刻蚀(DRIE)等工艺制备了微镜。在制备硅镜片的每一个工艺步骤结束后,使用激光干涉仪对硅镜面表面形变进行了检测。检测结果显示,制备的微镜在加载±1.5 kV电压时可以实现正向最大0.6μm、负向最大1.7μm的变形。着重讨论了硅镜片产生不均匀形变的原因,并提出了一些解决办法。As a core component of adaptive optics systems,the deformable reflection mirror has developed in the direction of miniaturization and integration through the combination with micro-electromechanical system(MEMS)technology.Based on the inverse piezoelectric effect of piezoelectric materials,a piezoelectrically driven deformable reflective micromirror was designed and prepared,which could be driven and controlled by electrical signals.The designed deformable reflection micromirror is composed of a silicon mirror,a pbbased lanthanumdoped zirconate tita-nates(PZT)actuator and a glass substrate.The finite element simulation software was used to optimize the structure of the silicon mirror.The micromirror was prepared by physical vapor deposition,ultraviolet lithography,eutectic bonding,mechanical cutting,deep reactive ion et-ching(DRIE)and other processes.After each process step of the silicon mirror,the surface deformation of the silicon mirror was detected by a laser interferometer.The detection results show that when the micromirror is loaded with±1.5 kV voltage,the prepared micromirror can achieve a maximum forward deformation of 0.6μm and a maximum negative deformation of 1.7μm.The causes of non-uniform deformation of the silicon mirror are discussed emphatically,and some solutions are put forward.

关 键 词：微电子机械系统(MEMS) 自适应光学系统 可变形反射微镜 硅镜片 压电材料 

分 类 号：TH703[机械工程—仪器科学与技术]