太赫兹喇叭芯模车削工艺研究  

Research on turning process of terahertz horn core mold

作　　者：张旭涛 曹强 石金 ZHANG Xutao;CAO Qiang;SHI Jin(China Academy of Space Technology(Xi’an),Xi’an 710000,China)

机构地区：[1]中国空间技术研究院西安分院,西安710000

出　　处：《空间电子技术》2021年第6期42-47,共6页Space Electronic Technology

摘　　要：太赫兹频段以其高分辨率和轻小型化等特点,在电子、信息、国防和航天领域拥有巨大的应用前景。以448 GHz太赫兹喇叭的芯模为研究对象,针对此类微细窄槽结构,进行加工工艺研究。通过装夹方式对受力的影响分析,优化加工过程中的装夹方式,减少径向切削力对同轴度和尺寸精度的影响;针对细微窄槽的加工,设计成型刀具,减少机床重复定位误差对窄槽精度影响;建立切削过程仿真模型优化切削参数,降低切削力;优化走刀路径,加强切削系统的刚性,以减小变形。通过试切对工艺方案进行验证,完成了在直径∅0.65~∅3.52 mm的锥形结构上均布宽0.1±0.005 mm,单边深度0.33 mm,间隔0.2 mm,即中间隔片厚度0.1 mm的窄槽加工。从而解决此类高精度微细结构加工难题,为更高频段太赫兹喇叭加工提供工艺经验。The terahertz frequency band has a great application prospect in the fields of electronics,information,national defense and aerospace because of its high resolution and miniaturization.In this paper,the mold of 448 GHz terahertz horn is taken as the research object.For this kind of micro narrow groove structure,the process is optimized.To reduce the influence of radial cutting force on coaxiality and dimensional accuracy,design the forming cutting tool for the processing of fine narrow groove,reduce the influence of repeated positioning error of machine tool on narrow groove accuracy;The simulation model of cutting process was established to optimize the cutting paramenters and reduce the cutting force.Optimize the tool path and strengthen the rigidity of the cutting system to reduce the deformation.The process scheme was verified by trial cutting,and the cone structure with diameter of∅0.65~∅3.52 mm was completed with average width of 0.1±0.005 mm,unilateral depth of 0.33 mm and smell separation of 0.2 mm,this is the middle partition wall thickness of 0.1 mm narrow groove processing.so as to solve this kind of high-precision micro-structure processing problem,for higher frequency terahertz horm processing provides work.

关 键 词：太赫兹 窄槽 仿真 切削参数 

分 类 号：V747[航空宇航科学技术]