超快激光微孔加工技术在频率选择面制造中的应用  

The fabrication of quasi-optical frequency selective surfaceby femtosecond laser micromachining

作　　者：程光华 刘佳[2] 张轩 CHENG Guanghua;LIU Jia;ZHANG Xuan(School of Artificial Intelligence,Optics and Electronics,Northwestern Polytechnical University,Xi’an 710072,China;China Academy of Space Technology(Xi’an),Xi’an 710000,China;Xi’an Shangtai Optic-Electric Technology Co.,Ltd.,Xi’an 710065,China)

机构地区：[1]西北工业大学光电与智能研究院,西安710072 [2]中国空间技术研究院西安分院,西安710000 [3]西安尚泰光电科技有限责任公司,西安710065

出　　处：《空间电子技术》2021年第6期48-55,共8页Space Electronic Technology

基　　金：国家重点研发计划项目(编号:2018YFB1107401)。

摘　　要：频率选择面作为准光学馈电系统的关键频率器件,其传输特性直接关系到整个准光学馈电系统的性能。针对馈电系统中的频率分离方案,设计了一种基于小孔阵列的准光型频率选择表面结构,用于有效分离54 GHz和183 GHz的频率信号;并利用飞秒激光微制造技术加工了有效孔径150 mm的钛合金圆柱孔阵列频率选择面,通过对准光学馈电系统样机的传输特性的实验测试,显示了飞秒激光加工群孔优良的一致性,验证了飞秒激光加工大尺寸频率选择面的有效性和可行性。Frequency selective surface is the key component of the quasi-optical feed system,and its transmission characteristics directly affect the performance of the whole quasi-optical feed system.Aiming at the frequency departure in the seed system,a frequency selective surface structure based on the pinholes array is designed at high refraction at 54 GHz and high transmission at 183 GHz.Meanwhile,a titanium alloy frequency selective surface of cylindrical holes array of 150 mm effective aperture is fabricated by femtosecond laser microfabrication.The transmission characteristics of the quasi-optical feed system sample machine are measured.The test results demonstrate that the consistency of array holes diameter drilled by femtosecond laser and the validity and feasibility of large size frequency selective surface.

关 键 词：准光频率选择面 飞秒激光 传输特性 群孔加工 

分 类 号：V747[航空宇航科学技术]