A compact polarization-integrated long wavelength infrared focal plane array based on In As/GaSb superlattice  

作　　者：Jian ZHOU Yi ZHOU Ying SHI Fangfang WANG Zhicheng XU Zhizhong BAI Min HUANG Lulu ZHENG Zhaoming LIANG Yihong ZHU Qingqing XU Yiming SHEN Xiangxiao YING Jianxin CHEN 

机构地区：[1]Key Laboratory of Infrared Imaging Materials and Devices,Shanghai Institute of Technical Physics,Chinese Academy of Sciences,Shanghai 200083,China [2]Hangzhou Institute for Advanced Study,University of Chinese Academy of Sciences,Hangzhou 310024,China

出　　处：《Science China(Information Sciences)》2022年第2期200-206,共7页中国科学（信息科学）（英文版）

基　　金：supported by National Natural Science Foundation of China(NSFC)(Grant Nos.61904183,61974152,61534006);National Key Research and Development Program of China(Grant No.2016YFB0402403);Innovation Engineering Frontier Program of SITP,CAS(Grant No.233);Youth Innovation Promotion Association,CAS(Grant No.2016219)。

摘　　要：Real-time polarization imaging plays a vital role in target detection,recognition,and tracking in complex scenes.However,large optical crosstalk and the integration technology are difficult problems in the development of polarization-integrated infrared detectors.We demonstrate a monolithic long wavelength infrared(LWIR)In As/Ga Sb superlattice focal plane array(FPA)integrated with the polarizer.To obtain high performance and real-time polarization imaging devices,the parameters of the grating were optimized and the optical crosstalk between adjacent polarization bands was studied.We analyze the light diffraction depending on the distance between the polarizer and photosensitive elements and the coupling between oblique incident light and device.The fabrication process of the antireflective polarizer,the integration technology of the polarizer and the FPA composed of 512×4×3 pixels were explored.Finally,a polarization integrated focal plane array(PI-FPA)was fabricated to detect polarized light with different oscillating directions.The large response extinction ratio of corresponding polarization bands was measured as 50:1,49:1,and 44:1 of 0°,60°,and 120°,respectively.

关 键 词：LWIR polarization integration infrared detector optical crosstalk extinction ration 

分 类 号：TN215[电子电信—物理电子学]