B_(2)O_(3)对LTPS用基板玻璃结构和黏温性能的影响  

Effect of B_(2)O_(3) on Structure and Viscosity-temperature Properties of the Substrate for LTPS

作　　者：杨国洪 孔令歆 曾召 王答成 徐莉华 兰静 郭静 YANG Guohong;KONG Lingxin;ZENG Zhao;WANG Dacheng;XU Lihua;LAN Jing;GUO Jing(IRICO Display Devices Co.,Ltd.,Xianyang 712000,China)

机构地区：[1]彩虹显示器件股份有限公司,咸阳712000

出　　处：《玻璃》2022年第2期7-12,共6页Glass

摘　　要：以LTPS用无碱基板玻璃配比料方,探讨B_(2)O_(3)对无碱硼铝硅酸盐玻璃结构和黏温性能的影响。通过红外光谱和X射线光电子能谱对玻璃试样进行网络结构分析,并测试了玻璃试样的高温黏度、软化点温度、退火点温度和应变点温度。结果表明:B_(2)O_(3)含量较低(0.13%)时,B^(3+)以四配位的[BO_(4)]存在;随着B_(2)O_(3)含量升高,满足[BO_(4)]形成之外的B;逐渐以[BO_(3)]的形式存在;[BO_(3)]含量增多,玻璃黏度逐渐下降。Using the non-alkali substrate glass for LTPS,the effect of B_(2)O_(3) on the structure and viscositytemperature properties of alkali-free boro-aluminosilicate glass was discussed.The structure of the glass was analyzed by FTIR and XPS,and the high-temperature viscosity,softening point temperature,annealing point temperature and strain point temperature of the glass were tested.The results show that:when the content of B_(2)O_(3) is low(0.13%),B^(3+) exists as four-coordinated[BO_(4)];as the content of B_(2)O_(3) increases,B^(3+)that satisfies the formation of[BO_(4)]gradually exists in the form of[BO_(3)];with the content of[BO_(3)]increasing,the viscosity ofthe glass gradually decreases.

关 键 词：LTPS 无碱基板玻璃 B_(2)O_(3) 玻璃结构 黏温性能 

分 类 号：TQ171[化学工程—玻璃工业]