真空镀膜法制备纳米铝颗粒膜及其表面等离激元共振特性研究  

Fabrication of Nano-Aluminum Nanoparticles Thin Films by Vacuum Coating and Study on its Surface Plasmon Resonance Properties

作　　者：赵世奇 郝宏亮 巩燕龙 吴俊[1] 褚向前[1] 刘月豹 方应翠[1,3] ZHAO Shiqi;HAO Hongliang;GONG Yanlong;WU Jun;CHU Xiangqian;LIU Yuebao;FANG Yingcui(School of Mechanical Engineering,Hefei University of Technology,Hefei 230009,China;Anhui Fangxing Optoelectronic New Material Technology Co.,Ltd.,Hefei 230051,China;Intelligent Manufacturing Institute of Hefei University of Technology,Hefei 230000,China)

机构地区：[1]合肥工业大学真空与过程装备系,合肥230009 [2]安徽方兴光电新材料科技有限公司,合肥230051 [3]合肥工业大学智能制造技术研究院,合肥230000

出　　处：《真空科学与技术学报》2022年第1期46-54,共9页Chinese Journal of Vacuum Science and Technology

基　　金：合肥工业大学智能制造技术研究院科技成果培育项目(IMIPY2021005);安徽方兴光电新材料校企合作项目;国家自然基金面上项目(11674081)。

摘　　要：采用直流磁控溅射镀膜技术制备了纳米铝颗粒膜,并尝试通过两种方式获得纳米铝的表面等离激元共振吸收峰,一种是先在室温石英基底上沉积纳米铝,再进行真空退火;另一种是在热石英基底上沉积纳米铝。用透射电镜和扫描电子显微镜、X-射线光电子谱、紫外-可见吸收光谱表征了样品的形貌和晶态结构、成份和吸收特性。采用比对的方式,研究了基底温度、沉积时间对两种方法制备的纳米铝表面等离激元共振的影响。结果表明,先沉积纳米铝,再进行真空退火,不能获得表面等离激元共振吸收峰,而在热基底上沉积纳米铝,可以获得明显的表面等离激元共振吸收峰。通过调控沉积时间和沉积温度实现了纳米铝表面等离激元共振峰从紫外光区到可见光区的可控移动。而且,研究发现对于平均厚度大于3 nm的纳米铝薄膜,由于纳米铝氧化具有自限性,其表面等离激元共振特性在空气中稳定且主要取决于纳米铝颗粒的团聚度。本研究对理解纳米铝表面等离激元共振特性及其应用具有指导意义。Aluminum nanoparticles(AlNPs) thin films were fabricated by DC magnetron sputtering coating.Two methods were used to obtain localized surface plasmon resonance(LSPR) of AlNPs.One is the deposition of nano-aluminum on a quartz substrate at room temperature followed by annealing under vacuum at elevated temperatures,and the other is the deposition of nano-aluminum on a hot quartz substrate.The morphology,crystal structure,composition and absorption characteristics of the samples were characterized by transmission electron microscopy,scanning electron microscopy,X-ray photoelectron spectroscopy and UV-vis absorption spectroscopy.The effects of substrate temperature and deposition time on the LSPRs of the nano-aluminum prepared by the two methods were studied by comparison.It was found that the former is ineffective while the latter is effective.The position and intensity of the LSPR can be tuned by adjusting the deposition time of Al thin films.Furthermore,due to the selflimited oxidation of AlNPs,the LSPR of AlNPs of average thicknesses larger than 3 nm was mainly determined by the agglomeration degree of the AlNPs.This study promotes the understanding of the LSPR properties of AlNPs and their applications.

关 键 词：真空镀膜 纳米铝 表面等离激元共振 热基底 

分 类 号：TB43[一般工业技术]