High efficiency,small size,and large bandwidth vertical interlayer waveguide coupler  

作　　者：Shao-Yang Li Liang-Liang Wang Dan Wu Jin You Yue Wang Jia-Shun Zhang Xiao-Jie Yin Jun-Ming An Yuan-Da Wu 李绍洋;王亮亮;吴丹;游金;王玥;张家顺;尹小杰;安俊明;吴远大(State Key Laboratory of Integrated Optoelectronics,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China;Center of Materials Science and Optoelectronics Engineering,University of Chinese Academy of Sciences,Beijing 100049,China;College of Materials Science and Opto-Electronic Technology,University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]State Key Laboratory of Integrated Optoelectronics,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China [2]Center of Materials Science and Optoelectronics Engineering,University of Chinese Academy of Sciences,Beijing 100049,China [3]College of Materials Science and Opto-Electronic Technology,University of Chinese Academy of Sciences,Beijing 100049,China

出　　处：《Chinese Physics B》2022年第2期329-335,共7页中国物理B（英文版）

基　　金：supported by the National Key Research and Development Program of China(Grant No.2019YFB2203001);the Strategic Priority Research Program of the Chinese Academy of Sciences(Grant No.XDB43000000);the National Natural Science Foundation of China(Grant No.61805232)。

摘　　要：Since the advent of three-dimensional photonic integrated circuits,the realization of efficient and compact optical interconnection between layers has become an important development direction.A vertical interlayer coupler between two silicon layers is presented in this paper.The coupling principle of the directional coupler is analyzed,and the traditional method of using a pair of vertically overlapping inverse taper structures is improved.For the coupling of two rectangular waveguide layers,a pair of nonlinear tapers with offset along the transmission direction is demonstrated.For the coupling of two ridge waveguide layers,a nonlinear taper in each layer is used to achieve high coupling efficiency.The simulation results show that the coupling efficiency of the two structures can reach more than 90%in a wavelength range from 1500 nm to 1650 nm.Moreover,the crosstalk is reduced to less than-50 d B by using multimode waveguides at intersections.The vertical interlayer coupler with a nonlinear taper is expected to realize the miniaturization and dense integration of photonic integrated chips.

关 键 词：silicon photonics vertical coupling nonlinear tapers three-dimensional integration 

分 类 号：TN622[电子电信—电路与系统]