酞菁钴微纳米线的制备及其湿敏特性研究  

Preparation and humidity sensitive properties of cobalt phthalocyanine micro-nanowires

作　　者：徐晓洁 王浩 塔力哈尔·夏依木拉提 彭敏[2] XU Xiaojie;WANG Hao;TALGAR Shaymurat;PENG Min(College of Physical Science and Technology,Yili Normal University,Yining 835000,Xinjiang Uyghur Antonomous Reginn,China;Key Laboratory of New Energy Materials of Xinjiang Institute of Engineering,Urumqi 830000,China)

机构地区：[1]伊犁师范大学物理科学与技术学院,新疆伊宁835000 [2]新疆工程学院自治区教育厅新能源材料研究重点实验室,新疆乌鲁木齐830000

出　　处：《电子元件与材料》2022年第2期164-169,共6页Electronic Components And Materials

基　　金：国家自然科学基金(62061046,51403180);新疆维吾尔自治区教育厅高校科研计划项目(XJEDU2019Y058)。

摘　　要：在预处理衬底上采用物理气相输运法制备了长度100μm以上的CoPc微纳米线,并采用滴注法构筑了基于CoPc微纳米线的电阻式湿度传感器。研究了传感器的湿敏特性及其响应机理。结果显示基于CoPc微纳米线的电阻式湿度传感器具有良好的重复稳定性、低检测下限(33%RH)和快速响应-恢复时间(分别为5 s和2 s)。研究表明有机微纳米材料在高性能、低成本、柔性湿度传感器领域中具有广阔的发展前景。CoPc micro-nanowires with a length of more than 100μm were obtained by physical vapor transport method on the pretreated substrate,and the resistive humidity sensor based on CoPc micro-nanowires was fabricated by the drip method.The humidity sensitive characteristics and response mechanism of the sensor were investigated.The results show that the sensor has good repeatability,low detection lower limit(33%RH)and fast response and recovery time(5 s and 2 s,respectively).The research shows that the organic micro-nano materials have broad application prospects in the field of high performance,low cost and flexible humidity sensors.

关 键 词：有机材料 酞菁钴 微纳米线 湿度传感器 检测下限 响应-恢复时间 

分 类 号：TN379[电子电信—物理电子学]