大气等离子体表面改性对PEI绝缘子真空沿面耐压性能的影响  

Effect of Atmospheric Plasma Treatment on Vacuum Surface Voltage-Withstand Performance of PEI Insulators

作　　者：张贝 刘文元[2] 霍艳坤 程军 白现臣[2] 柯昌凤[2] 师全林[2] ZHANG Bei;LIU Wen-yuan;HUO Yan-kun;CHENG Jun;BAI Xian-chen;KE Chang-feng;SHI Quan-lin(Academic Institution of Material Science and Engineer,Xiangtan University,Xiangtan 411105,China;Northwest Institute of Nuclear Technology,Xi’an 710024,China)

机构地区：[1]湘潭大学材料科学与工程学院,湘潭411105 [2]西北核技术研究所,西安710024

出　　处：《现代应用物理》2021年第4期77-84,共8页Modern Applied Physics

基　　金：高功率微波技术重点实验室基金资助项目(HPM1704)。

摘　　要：采用电离空气产生等离子体的方式,对聚醚酰亚胺(PEI)绝缘子进行了表面改性处理,研究了处理时间对PEI表面成分、形貌及真空沿面耐压性能的影响。将PEI绝缘子在旋转处理平台上经过不同时间等离子体处理后,通过红外光谱和X射线光电子能谱对表面成分变化进行了表征,通过扫描电子显微镜和原子力显微镜对表面结构变化进行了表征,最后对不同等离子体处理时长的PEI绝缘子进行了二次电子发射系数、表面电导率和沿面耐压水平测试。测试结果表明,等离子体处理能够增加PEI绝缘子表面C-O,C=O等极性基团数量,并在PEI表面形成起伏微结构,造成粗糙度增加;成分与结构的改变引起PEI绝缘子表面二次电子发射系数降低和表面电导率上升;表面特性的改变显著提升了PEI绝缘子真空沿面闪络电压,等离子体处理10 s使PEI绝缘子真空沿面闪络电压提升了62.5%。Polyetherimide(PEI)insulators are modified by plasma produced by ionized air to study the effect of the modification time on the surface chemical compositions,surface morphologies,and vacuum surface voltage-withstand strength of PEI insulators.First,PEI insulators are modified on the spinning treatment platform by plasmas under different time.Then,the changes of the surface compositions are characterized by infrared spectrum and X-ray electron dispersion spectrum.The changes of the surface structure are characterized by scanning electron microscope and atomic force microscope.Finally,the secondary electron emission coefficient,the surface conductivity,and the surface flashover voltage of the PEI insulators treated in different time are tested.The test results show that plasma treatment can increase the number of polar chemical groups such as C-O and C=O on the surface of PEI insulator,and form fluctuant microstructures on the surface of PEI,resulting in the increase of surface roughness.The changes of surface compositions and surface structure cause the decrease of the secondary electron emission coefficient and the increase of surface conductivity of PEI insulator.The change of surface characteristics greatly increase the insulator flashover voltage,and the vacuum surface flashover voltage of PEI insulator increased by 62.5%when the plasma treatment time is 10 s.

关 键 词：等离子体 电离空气 PEI绝缘子 沿面闪络 

分 类 号：TL67[核科学技术—核技术及应用]