基于有序造型设计的干气密封超快激光精密加工  

Ultrafast Laser Precision Machining of Dry Gas Seal Based on Ordered Texture Design

作　　者：王衍 王英尧 肖喻丰 胡琼 赵全忠[2,3] 付强 WANG Yan;WANG Yingyao;XIAO Yufeng;HU Qiong;ZHAO Quanzhong;FU Qiang(School of Mechanical Engineering,Jiangsu Ocean University,Lianyungang 222005,Jiangsu,China;State Key Laboratory of High Field Laser Physics,Shanghai Institute of Optics and Fine Mechanics,the Chinese Academy of Sciences,Shanghai 201800,China;Nanjing Institute of Advanced Laser Technology,Nanjing 210038,China;Nanjing Cuizhi Laser Application Technology Research Institute Co.,Ltd.,Nanjing 210038,China)

机构地区：[1]江苏海洋大学机械工程学院,江苏连云港222005 [2]中国科学院上海光学精密机械研究所强场激光物理国家重点实验室,上海201800 [3]南京先进激光技术研究院,南京210038 [4]南京萃智激光应用技术研究院有限公司,南京210038

出　　处：《材料导报》2022年第5期40-48,共9页Materials Reports

基　　金：国家自然科学基金项目(51805199);江苏省自然科学基金项目(BK20191471);江苏省重点研发计划(产业前瞻与共性关键技术)项目(BE2017001);江苏省高校“青蓝工程”项目;江苏“六大人才高峰”项目(GDZB-076);连云港市“521工程”项目;江苏海洋大学人才引进科研基金项目(KQ19004);江苏省高等学校自然科学研究面上项目(19KJB460010)。

摘　　要：干气密封的核心技术在于微米级槽型的加工,密封槽型的理论深度hg一般为3~10μm、粗糙度Ra≤0.8μm,目前的主流开槽方式为激光加工,但其实际加工精度与理论研究存在较大差距,严重影响了干气密封的实际使用效果。本工作通过采用超快激光加工技术,以碳化硅(SiC)材料为实验对象,实现了槽深幅值波动区间为2μm、最大粗糙度为0.59μm水平的槽型精密加工,提出了以材料气化阈值对应最小激光能量为基准的超快激光精密加工工艺思路。同时结合有序造型设计方法,得到了有序性好、规整度高的有序造型槽型结构,微尺度织构间距的最大误差仅为2.5%。该技术较传统工艺方法的加工时间缩短约30%,实现了适用于实际工业应用的低成本、高效率的有序造型激光定向加工技术。最后提出了基于同一检测手段下的平均多处随机检测均方差的质量检测评价方法,可对干气密封开槽质量及深度进行科学认定,研究结果可为进一步提高干气密封的加工制造水平、降低成本提供理论和技术支持。The core technology of dry gas seals lies in the processing of micro-level grooves.The theoretical required depth hg is 3—10μm and roughness of seal grooves Ra is≤0.8μm.Currently,laser processing is the mainstream slotting method,but the actual processing accuracy differs from theoretical research,affecting the actual implementation of dry gas seal.In this study,by employing an ultra-fast laser processing technology and using silicon carbide(SiC)as the experimental object,the precision machining of the groove with a fluctuating range of 2μm in groove depth and a maximum roughness of 0.59μm is realized.An ultra-fast laser precision machining process idea based on the benchmark of minimum laser energy corresponding to the gasification threshold of the material is proposed.Meanwhile,based on the orderly modeling design method,an orderly modeling groove structure with good orderliness and high regularity is obtained,as well as a maximum error of 2.5%in microscale texture spacing.This technology shortens the processing time by approximately 30%compared with the traditional process method,and realizes a low-cost,high-efficiency,and orderly modeling laser-directed processing technology suitable for practical industrial applications.A quality inspection and evaluation method based on the mean square error of average multiple random inspections under the same inspection method is proposed.This method can scientifically confirm the quality and depth of slotting with dry gas seals.The research results can provide theoretical and technical support to further improve the processing and manufacturing level of dry gas seals and reduce costs.

关 键 词：干气密封 有序造型 超快激光 质量检测 精密加工 

分 类 号：TH117[机械工程—机械设计及理论]