基于光子晶体狭缝纳米梁腔法诺共振的传感特性  

Sensing Characteristics Based on Fano Resonance of Photonic Crystal Slot Nanobeam Cavity

作　　者：马娇 李锦屏[1] 吴小所[1,2] 周冬梅 Ma Jiao;Li Jinping;Wu Xiaosuo;Zhou Dongmei(School of Electronic and Information Engineering,Lanzhou Jiaotong University,Lanzhou,Gansu 730070,China;Key Lab of Opt-Electronic Technology and Intelligent Control of Minisitry of Education,Lanzhou Jiaotong University,Lanzhou,Gansu 730070,China)

机构地区：[1]兰州交通大学电子与信息工程学院,甘肃兰州730070 [2]兰州交通大学光电技术与智能控制教育部重点实验室,甘肃兰州730070

出　　处：《光学学报》2021年第24期153-160,共8页Acta Optica Sinica

基　　金：甘肃省重点研发计划项目(20YF8GA035);甘肃省科技厅规划项目(18JR3RA123);甘肃省科学院应用研究与开发计划(2018JK-02);兰州市城关区科技计划项目(2019RCCX0007);甘肃省教育厅资助项目(2018B-029);甘肃省住建厅计划项目(JK2017-24)。

摘　　要：为了提高光子晶体谐振腔的传感性能,提出了一种光子晶体纳米梁耦合光子晶体狭缝纳米梁腔的法诺谐振结构。在包含锥形孔的纳米梁腔中引入狭缝结构,获得了高局域化光场,进而产生了较强的光与物质相互作用,实现了灵敏度的提高。利用三维有限差分时域法进行模拟仿真,发现该结构的折射率传感器灵敏度高达897 nm/RIU,结构大小仅为21.4μm×1.55μm。同时,根据耦合模理论,阐述了法诺共振产生的机制,并定性地分析了该结构的传输特性随结构参数的变化。A Fano resonant structure based on the coupling of the photonic crystal nanobeam with the photonic crystal slot nanobeam cavity is proposed to improve the sensing performance of the photonic crystal resonant cavity.A slot structure is designed in the nanobeam cavity with conical holes to obtain a highly localized light field that produces strong light-matter interaction and ultimately to improve the sensitivity.The model is simulated by the three-dimensional finite-difference time-domain method,and it is found that the sensitivity of the refractive index sensor with the proposed structure reaches up to 897 nm/RIU,and the size of the proposed structure is only 21.4 μm ×1.55 μm.In light of the coupled-mode theory,the mechanism of Fano resonance is discussed and the variation of the transmission characteristics of the proposed structure with the structural parameters is analyzed qualitatively.

关 键 词：集成光学 光子晶体 谐振腔 折射率传感 

分 类 号：TN256[电子电信—物理电子学]