快照傅里叶变换成像光谱仪阵列非均匀特性的Monte Carlo分析  

Monte Carlo Analysis of Array Non-Uniformity in Snapshot Fourier Transform Imaging Spectrometer

作　　者：吕金光[1] 梁静秋[1] 王维彪[1] 秦余欣[1,2] 陶金 Lv Jinguang;Liang Jingqiu;Wang Weibiao;Qin Yuxin;Tao Jin(State Key Laboratory of Applied Optics,Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun,Jilin 130033,China;University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,吉林长春130033 [2]中国科学院大学,北京100049

出　　处：《光学学报》2021年第24期276-285,共10页Acta Optica Sinica

基　　金：国家自然科学基金(61805239,61627819,61727818);吉林省科技发展计划(20190303063SF,20180201024GX,20150520101JH);中国科学院青年创新促进会基金(2018254)。

摘　　要：快照傅里叶变换成像光谱仪通过微透镜阵列的多重成像与微反射镜阵列的分布式相位调制实现图谱信息的实时获取。由于阵列器件制作精度的限制,微透镜阵列与微反射镜阵列各单元之间的结构参数会存在不同程度的偏差,从而影响系统的性能。微透镜阵列各透镜单元之间结构参数的偏差可以等效为焦距的非均匀性,微反射镜阵列各阶梯单元之间的差别主要体现在阶梯步长的非均匀性上。本文根据微透镜阵列与微反射镜阵列对光场的相位调制特性,建立了非均匀误差的光场传输模型。采用Monte Carlo方法分别对微透镜阵列的焦距非均匀性和微反射镜阵列的步长非均匀性进行误差合成,统计分析表明相对光谱误差量随着焦距标准差及步长标准差的增加而单调递增。针对步长非均匀误差提出了一种离散光谱相位补偿的光谱校正方法,该方法有效降低了微反射镜阵列的制作精度要求,提高了复原光谱的质量。For the multiple imaging by the microlens array and the distributed phase modulation by the micromirror array,the snapshot Fourier transform imaging spectrometer can acquire image and spectrum information in real time.Limited by the fabrication accuracy of array devices,the structural parameters of the units in the microlens array and the micromirror array display different degrees of deviations,which affects the system performance.The structural parameter deviations of the lens units in the microlens array can be equated with the non-uniformity of the focal length,and the differences among the step units in the micromirror array are mainly reflected in the non-uniformity of the step length.A model of optical field propagation with non-uniform errors was built according to the phase modulation characteristics of the microlens array and the micromirror array on the optical field.The Monte Carlo method was used to synthesize the non-uniform errors of the focal length of the microlens array and the step length of the micromirror array.Statistical analysis showed that the relative spectrum error increased monotonously with the increase in the standard deviations of the focal length and the step length.Given the non-uniform error of the step length,a spectrum correction method of discrete spectrum phase compensation was proposed.The method effectively reduced the fabrication accuracy requirement on the micromirror array and improved the quality of the recovered spectrum.

关 键 词：光谱学 傅里叶变换光谱仪 非均匀误差 Monte Carlo方法 

分 类 号：O433.1[机械工程—光学工程]