超材料吸收器集成微流控的双带太赫兹传感器  

Dual-Band Terahertz Sensor Based on Metamaterial Absorber Integrated Microfluidic

作　　者：杨洁萍 王民昌[2] 邓琥[1,3] 康莹 李宗仁[1] 刘泉澄 熊亮 武志翔[1] 屈薇薇[1] 尚丽平[1,3] Yang Jieping;Wang Minchang;De Hu;Kang Ying;Li Zongren;Liu Quancheng;Xiong Liang;Wu Zhixiang;Qu Weiwei;Shang Liping(School of Information Engineering,Southwest University of Science and Technology,Mianyang,Sichuan 621000,China;Xi'an Modern Chemistry Research Institute,Xi'an,Shaanxi 710065,China;Robot Technology Used for Special Environment Key Laboratory of Sichuan Province,Mianyang,Sichuan 621000,China)

机构地区：[1]西南科技大学信息工程学院,四川绵阳621000 [2]西安近代化学研究所,陕西西安710065 [3]特殊环境机器人技术四川省重点实验室,四川绵阳621000

出　　处：《光学学报》2021年第23期210-218,共9页Acta Optica Sinica

基　　金：国家自然科学基金(11872058);国防技术基础项目(JSZL2017404A001,JCKY2018404C007,JSZL2018204C002);四川省科技厅重点研发项目(2019YFG0114)。

摘　　要：为了降低检测溶液样本时水对太赫兹的强烈吸收并提高传感器的灵敏度,提出了两种超材料吸收器集成微流控的双带太赫兹传感器。两种传感器的单元谐振结构均由金属环和双"I"型交叉结构组成,在0.2~1.4 THz频段内可产生两个完美吸收峰,折射率灵敏度可达300 GHz/RIU。实验结果表明,设计的两种双带太赫兹传感器具有偏振不敏感性和宽入射角不敏感性,在-4%~4%的制造公差范围内能保持良好的传感性能,在生物医学领域具有潜在的应用价值。In order to reduce the strong absorption of terahertz by water when detecting solution samples and improve sensitivity of sensor,we propose two dual-band terahertz sensors based on metamaterial absorber integrated microfluidic.The unit resonance structure of the two sensors is composed of metal ring and double I-type cross structure,which produces two perfect absorption peaks in the frequency range of 0.2--1.4 THz,and the refractive index sensitivity can reach 300 GHz/RIU.Experimental results show that the designed two dual-band terahertz sensors have polarization insensitivity and wide incident angle insensitivity,and keep good sensing performance within fabrication tolerance range-4%--4%,and have potential application in the field of biomedicine.

关 键 词：传感器 太赫兹 超材料吸收器 微流控 

分 类 号：O439[机械工程—光学工程]