基于压电力显微镜的铌酸锂电畴稳定性研究  

Study of Lithium Niobate Domain Stability Based on Piezoresponse Force Microscope

作　　者：何锦龙 穆继亮[1,2] 耿文平 He Jinlong;Mu Jiliang;Geng Wenping(Key,Laboratory of Instrumentation Science and Dynamic Measurement of Ministry of Education,North University of China,Taiyuan 030051,China;School of Instrument and Electronics,North University of China,Taiyuan 030051,China)

机构地区：[1]中北大学仪器科学与动态测试教育部重点实验室,太原030051 [2]中北大学仪器与电子学院,太原030051

出　　处：《半导体技术》2022年第2期100-104,共5页Semiconductor Technology

基　　金：国家自然科学基金资助项目(62171415);山西省回国留学人员科研资助项目(2021-112)。

摘　　要：研究了Z切700 nm厚的单晶铌酸锂(LiNbO_(3))薄膜电畴的调控方法。利用X射线衍射仪(XRD)和原子力显微镜(AFM)对单晶LiNbO_(3)薄膜的晶向和形貌进行了表征,并通过外加电场对单晶LiNbO_(3)薄膜电畴进行调控。研究结果表明,该LiNbO_(3)薄膜具有单一的(006)衍射峰,表面光滑、粗糙度低(均方根粗糙度小于1 nm)。通过外加电场和预设电畴图案对LiNbO_(3)电畴进行精准调控,并测试了电畴稳定性。测试结果显示,调控后的电畴在温度为25~150℃内处于稳定状态,且在30 d内保持稳定,未发生弛豫现象。该研究为LiNbO_(3)电畴工程器件的研发和应用提供了重要的技术支撑。The modulation methods of the domain of Z-cut single crystal lithium niobate(LiNbO_(3))thin films with a thickness of 700 nm were studied.By using X-ray diffractometer(XRD)and atomic force microscope(AFM),the crystal orientation and the morphology of the single crystal LiNbO_(3)thin film were characterized.The domain of the single crystal LiNbO_(3)thin film was modulated by the external electric field.The results show that the LiNbO_(3)thin film has a single(006)diffraction peak,a smooth surface and low roughness(the root mean square roughness is less than 1 nm).The domain of LiNbO_(3)was accurately modulated with the external electric field and the preinstalled domain pattern,and the stability of the domain was tested.The test results show that the modulated domain remains a stable state at 25-150℃.And no relaxation phenomenon has occurred within 30 d.This research provides an important technical support for the development and application of LiNbO_(3)domain engineering devices.

关 键 词：铌酸锂(LiNbO_(3)) 铁电材料 电畴 压电力显微镜(PFM) 极化 

分 类 号：TN304.9[电子电信—物理电子学] TM225[一般工业技术—材料科学与工程]