基于声表面波的电站锅炉受热面温度监测传感器研究  

Research on Temperature Monitoring Sensor of Heating Surface of Power Station Boiler Based on Surface Acoustic Wave

作　　者：王鑫雨 侯哲帆 李鸿源[1] 徐鸿[1] WANG Xin-yu;HOU Zhe-fan;LI Hong-yuan;XU Hong(School of Energy Power and Mechanical Engineering,North China Electric Power University,Beijing 102206,China)

机构地区：[1]华北电力大学能源动力与机械工程学院,北京102206

出　　处：《仪表技术与传感器》2022年第2期16-20,共5页Instrument Technique and Sensor

基　　金：国家重点研发计划资助项目(2018YFB0604402);中央高校基本科研业务费专项资金资助项目(2019MS015)。

摘　　要：为了直接测量电站锅炉高温受热面的温度,对声表面波温度传感器进行有限元模拟及制备,并进行高温实验研究。选择硅酸镓镧(LGS)作为高温压电基底材料,对Au、Pt、Cu三种电极及不同厚度进行模拟分析,最终选择100 nm厚的Au电极。实验结果表明该传感器谐振频率随温度呈下降趋势,温度灵敏度较好为5.89 kHz/℃,且高温时的测温稳定性较好。In order to directly measure the temperature of the high-temperature heating surface of the power station boiler,the surface acoustic wave temperature sensor was simulated by finite element method and the sensor was prepared,and high-temperature experimental research was carried out.The lanthanum gallium silicate(LGS)was selected as the high-temperature piezoelectric substrate material,and the three electrodes of Au,Pt,Cu and the different thicknesses of the three electrodes were simulated and analyzed.Finally,the 100 nm thick Au electrode was selected.The experimental results show that the resonance frequency of the sensor decreases with temperature,the temperature sensitivity is 5.89 kHz/℃,and the temperature measurement stability at high temperatures is better.

关 键 词：恶劣环境测温 声表面波 有限元 传感器 

分 类 号：TH811[机械工程—仪器科学与技术]