一种集成式石英谐振加速度计信号处理与融合方法  

Signal processing and fusion method of an integrated quartz resonant accelerometer

作　　者：陈福彬[1] 金鑫[2] 刘迪 田文杰[2] CHEN Fubin;JIN Xin;LIU Di;TIAN Wenjie(School of Automation,Beijing Information Science and Technology University,Beijing 100101,China;Sensor key laboratory,Beijing Information Science and Technology University,Beijing 100101,China)

机构地区：[1]北京信息科技大学自动化学院,北京100101 [2]北京信息科技大学传感器重点实验室,北京100101

出　　处：《中国惯性技术学报》2021年第6期803-808,共6页Journal of Chinese Inertial Technology

基　　金：国家自然科学基金(61871043);北京市教委科技计划重点项目(KZ201911232023)。

摘　　要：谐振式加速度计能够将加速度直接转化为稳定的频率信号,可以获得优良的性能。针对目前石英谐振加速度计灵敏度偏低,以及温度变化等因素引起的频率漂移等难题,提出了一种基于多电极谐振器的集成式石英加速度计的信号处理与融合的方法。集成式石英加速度计输出多路谐振信号,形成差频信号,融合后可以得到高精度的数字信号,设计了基于FPGA的电路实现方案。通过实验测试结果,输出数据响应时间为125 ms的条件下,传感器标度因数从传统的100 Hz/g以下提升到1742.5 Hz/g,线性相关系数为R^(2)=0.9985。提出的信号处理与融合方法具有较高的信号处理实时性,显著提高了石英谐振加速度计的灵敏度,可以应用于集成式石英谐振加速度计数据信号处理以及实时测量系统中。Resonant accelerometer can directly convert acceleration into stable frequency signal to obtain excellent performance.Aiming at the low sensitivity of quartz resonant accelerometer and frequency drift caused by temperature,a method of signal processing and fusion for integrated quartz accelerometer based on multi electrode resonator is proposed.The integrated quartz accelerometer outputs multi-channel resonant signals to form differential frequency signals.After fusion,high-precision digital signals can be obtained,and a circuit implementation scheme based on FPGA is designed.The experimental results show that when the output data response time is 125 ms,the scale factor of the sensor is increased from less than 100 Hz/g to 1742.5 Hz/g,and the linear correlation coefficient is R^(2)=0.9985.The designed signal processing and fusion system has high real-time performance of signal processing and improves the sensitivity of quartz resonant accelerometer,which can be applied to the data signal processing and real-time measurement system of integrated quartz resonant accelerometer.

关 键 词：集成式石英谐振器 信号处理 锁相倍频 石英谐振加速度计 

分 类 号：TH703[机械工程—仪器科学与技术]