热丝CVD法制备金刚石涂层刀具的研究现状  

Research Progress of Diamond Coated Tools Prepared by Hot Filament CVD

作　　者：万书宏 林晶[1] 冯帅 WAN Shu-hong;LIN Jing;FENG Shuai(Institute of light industry,Harbin University of Commerce,Harbin 150028,China;Harbin Huade University,Harbin 150028,China)

机构地区：[1]哈尔滨商业大学轻工学院,黑龙江哈尔滨150028 [2]哈尔滨华德学院,黑龙江哈尔滨150028

出　　处：《真空》2022年第1期40-47,共8页Vacuum

基　　金：黑龙江省教育厅省属高校科技成果研发支持计划(TSTAU-R2018009);哈尔滨商业大学研究生科研创新项目(YJSCX2020-679HSD)。

摘　　要：金刚石涂层刀具具有优异的硬度、耐磨性及导热性,在军事、航空航天等高精尖应用领域加工石墨、高硅铝合金、碳纤维增强塑料等难切削材料时无可替代,但目前金刚石涂层刀具存在两个问题:一是涂层与刀具间膜基结合力较差,导致涂层在使用中过早脱落;二是涂层表面粗糙度较大,难以保证被加工面的平整度与尺寸精度。本文从增强涂层结合力与降低涂层粗糙度两方面,将近年来科研人员对HFCVD法制备金刚石涂层的研究成果加以综述,并分析了各种因素对金刚石涂层刀具性能的影响。Diamond coated tools show excellent hardness,wear resistance and thermal conductivity.In military,aerospace and other high-end fields,there is no substitute for diamond coated tools in the processing of graphite,high silicon aluminum alloy,carbon fiber reinforced plastic and other difficult cutting materials.However,there are two problems with diamond coated tools.One is the poor adhesion between the coating and the cutting tool,which leads to the coating falling off prematurely in use.The other one is that it is difficult to ensure the flatness and dimensional accuracy of the machined surface due to the large surface roughness of the coating.In this paper,the research results of diamond coating prepared by HFCVD in recent years are reviewed from the aspects of enhancing the adhesion and reducing the roughness of coating,and the influence of various factors on the performance of diamond coated tools is analyzed.

关 键 词：热丝CVD 硬质合金衬底 金刚石涂层刀具 膜基结合力 表面粗糙度 

分 类 号：TQ127[化学工程—无机化工] TG174.4[金属学及工艺—金属表面处理]