真空电子太赫兹器件研究进展  

The research progress of vacuum electron device in terahertz band

作　　者：常少杰 吴振华[1,2] 黄杰[1,2] 赵陶[1,2] 刘頔威[1,2] 胡旻[1,2] 魏彦玉 宫玉彬[1,3] 刘盛纲 CHANG Shao-Jie;WU Zhen-Hua;HUANG Jie;ZHAO Tao;LIU Di-Wei;HU Min;WEI Yan-Yu;GONG Yu-Bin;LIU Sheng-Gang(Terahertz Science and Technology Research Center,University of Electronic Science and Technology of China,Chengdu 610054,China;Key Laboratory of Terahertz Technology,Ministry of Education,Chengdu 610054,China;National Key Laboratory of Science and Technology on Vacuum Electronics,University of Electronic Science and Technology of China,Chengdu 610054,China)

机构地区：[1]电子科技大学电子科学与工程学院太赫兹中心,四川成都610054 [2]太赫兹技术教育部重点实验室,四川成都610054 [3]电子科技大学微波电真空器件技术国家级重点实验室,四川成都610054

出　　处：《红外与毫米波学报》2022年第1期85-102,共18页Journal of Infrared and Millimeter Waves

基　　金：国家重点研发计划(2017YFA0701000,2020YFA0714001和2018YFF01013001);国家自然科学基金(61988102,61921002和62071108);中央高校基金(ZYGX2020ZB007)。

摘　　要：太赫兹波因其具有电子学与光子学的特性,所以在深空探测、无损检测、通信及安检等领域有巨大应用潜力。近些年,太赫兹技术的迅猛发展离不开太赫兹真空电子器件的不断进步。由于尺寸共度效应及电子束发射性能的限制,这类器件在迈向更高频段过程中遇到了不小的困难。针对这些问题,研究人员通过改良高频结构、控制加工精度、制备更优性能的材料、更精准的计算手段等一系列措施进行解决。本文介绍几种主流小型化太赫兹器件研究过程中的解决方案及最新进展,最后根据现阶段发展情况总结未来可能会遇到的问题及解决方法。The terahertz wave has great potential in deep space exploration,nondestructive testing,communication and security inspection because of its characteristics of electronics and photonics.The rapid development of terahertz technology in recent years is inseparable from the continuous progress of terahertz vacuum electronic devices.Due to the size sharing effect and the limitation of electron beam emission performance,this type of device has encountered considerable difficulty in the process of higher frequency bands.To solve these problems,a series of measures have been taken,such as improving high-frequency structure,controlling machining accuracy,preparing materials with better performance and more accurate calculation methods.This paper introduces the solutions and the latest progress of several mainstream miniaturized terahertz devices,and finally summarizes the problems and solutions that may be encountered in the future according to the current development situation.

关 键 词：真空电子器件 大功率太赫兹辐射源 研究进展 

分 类 号：O43[机械工程—光学工程]