基于0.18-μm锗硅BiCMOS工艺的60 GHz匹配型高隔离小型化变压器巴伦  

Miniaturized 60-GHz transformer-based balun splitter with isolation and matching performance in 0.18-μm SiGe BiCMOS

作　　者：张大为[1,3] 徐鑫 李斌[1] 徐辉[1] 于洪喜[1] 李军[1] 马凯学[2] THANGARASU Bharatha Kumar YEO Kiat Seng ZHANG Da-Wei;XU Xin;LI Bin;XU Hui;YU Hong-Xi;LI Jun;MA Kai-Xue;THANGARASU Bharatha Kumar;YEO Kiat Seng(Dept.of Microwave Technology,China Academy of Space Technology(Xi’an),Xi’an 710049,China;School of Microelectronics,Tianjin University,Tianjin 300072,China;Singapore University of Technology and Design(SUTD),Singapore 487372)

机构地区：[1]中国空间技术研究院西安分院微波技术研究所,中国陕西西安710049 [2]天津大学微电子学院,中国天津300072 [3]新加坡科技设计大学,新加坡487372

出　　处：《红外与毫米波学报》2022年第1期299-304,共6页Journal of Infrared and Millimeter Waves

基　　金：Supported by the National Natural Science Foundation of China(62001372).

摘　　要：介绍了一种工作在60 GHz频率的具有输出端口间高隔离和全端口匹配特性的小型化变压器巴伦芯片,该芯片采用0.18-μm锗硅BiCMOS工艺设计并加工。通过在60 GHz变压器巴伦的输出端口之间引入隔离电路,提高巴伦的隔离度性能并改善输出端口匹配性能;在此基础上,提出了一种基于左手材料传输线的隔离电路,能大大改善传统隔离电路中分布式传输线尺寸大的问题;为了进一步实现巴伦的小型化,在设计中采用了负载电容补偿技术,同时能改善变压器巴伦输入端口的匹配性能。设计的巴伦芯片经过电磁场仿真,其结果与在片测试结果有较高的一致性,验证了提出的设计方法,设计的巴伦芯片具有全端口匹配和输出端口间高隔离度的特性。基于实测结果,在60 GHz频率处,设计的巴伦芯片实现了超过25 dB的输出端口隔离度和优于18 dB的输出端口回波损耗,且占用尺寸极小,仅为0.022 mm^(2)。This paper presents the work of a miniaturized 60-GHz balun chip with isolation and matching performance fabricated in 0.18-μm SiGe BiCMOS process.The use of isolation circuit as key building blocks within a60-GHz transformer balun leads to an improved isolation performance between output ports,while simultaneously achieving the matching performance of them.Moreover,compared to the conventional isolation circuit,the artificial left-handed transmission line is introduced to remove the bulky distributed elements,and the capacitive loading compensation technique is utilized for both matching and miniaturization.Both electromagnetic simulation and measurement results of the proposed 60-GHz transformer balun chip design with isolation and matching characteristics are given with good agreement.From measurement results,better than 25-dB isolation and 18-dB return loss of the output ports have been achieved at 60 GHz,with an occupied area of 0.022 mm^(2).

关 键 词：变压器巴伦 隔离电路 60 GHz 左手材料传输线 

分 类 号：TN433[电子电信—微电子学与固体电子学]