Nanosecond laser-induced controllable periodical surface structures on silicon  

作　　者：Lei Chen Zelin Liu Chuan Guo Tongcheng Yu Minsun Chen Zhongjie Xu Hao Liu Guomin Zhao Kai Han 陈磊;刘泽琳;郭川;余同成;陈敏孙;许中杰;刘昊;赵国民;韩凯(College of Advanced Interdisciplinary Studies,National University of Defense Technology,Changsha 410073,China;Hunan Provincial Key Laboratory of High Energy Laser Technology,Changsha 410073,China;State Key Laboratory of Pulsed Power Laser Technology,Hefei 230037,China)

机构地区：[1]College of Advanced Interdisciplinary Studies,National University of Defense Technology,Changsha 410073,China [2]Hunan Provincial Key Laboratory of High Energy Laser Technology,Changsha 410073,China [3]State Key Laboratory of Pulsed Power Laser Technology,Hefei 230037,China

出　　处：《Chinese Optics Letters》2022年第1期186-191,共6页中国光学快报（英文版）

基　　金：supported by the National Natural Science Foundation of China (No. 61805279)

摘　　要：In this paper,an effective method is proposed to generate specific periodical surface structures.A 532 nm linearly polarized laser is used to irradiate the silicon with pulse duration of 10 ns and repetition frequency of 10 Hz.Laser-induced periodic surface structures(LIPSSs) are observed when the fluence is 121 mJ/cm;and the number of pulses is 1000.The threshold of fluence for generating LIPSS gradually increases with the decrease of the number of pulses.In addition,the laser incident angle has a notable effect on the period of LIPSS,which varies from 430 nm to 1578 nm,as the incident angle ranges from10° to 60° correspondingly.Besides,the reflectivity is reduced significantly on silicon with LIPSS.

关 键 词：laser-induced periodic surface structure NANOSTRUCTURES FLUENCE number of pulses incident angle 

分 类 号：TN249[电子电信—物理电子学] TQ127.2[化学工程—无机化工]