扫描电镜中X射线能谱仪的技术进展  

Technical Progress of X-ray Energy Dispersive Spectroscopy in Scanning Electron Microscope

作　　者：高尚 黄梦诗 杨振英 马清 GAO Shang;HUANG Mengshi;YANG Zhenying;MA Qing(School of Materials Science and Technology,Harbin Institute of Technology,Shenzhen 518055;Meixin Testing Technology Co.,Ltd,Shenzhen 518108;Education Center of Experiments and Innovations,Harbin Institute of Technology,Shenzhen 518055)

机构地区：[1]哈尔滨工业大学(深圳)材料科学与工程学院,广东深圳518055 [2]深圳市美信检测技术股份有限公司,广东深圳518108 [3]哈尔滨工业大学(深圳)实验与创新实践教育中心,广东深圳518055

出　　处：《分析科学学报》2022年第1期115-121,共7页Journal of Analytical Science

基　　金：教育部产学合作协同育人项目(No.201802284007);哈工大(深圳)创新实验项目(No.INEP1013);哈工大(深圳)高水平大学实验中心项目(No.AZ11000068)。

摘　　要：能谱仪作为扫描电镜进行成分分析的重要附件,已经得到非常广泛的应用。随着半导体技术和应用领域的拓展,近年来在能谱探测器上取得的技术进展令人鼓舞。这些进展包括硅漂移探测器的普及,大面积探测器、平插设置以及对窗口材料的改进等。本文介绍了能谱探测器的基本结构,总结了硅漂移探测器的技术进展和性能优势,以及低加速电压能谱探测技术的进展和算法在能谱技术中的应用。As an important accessory for scanning electron microscopy for composition analysis,X-ray energy dispersive spectroscopy(EDS)is widely used.With the expansion of semiconductor technology and application fields,a lot of technological progress has been made in EDS detectors in recent years.These developments include the widespread silicon drift detectors(SDD),large-area detectors,annular SDD settings,and improvements to window’s material.This article introduces the basic structure of EDS detector,then introduces the advantages of the SDD,then focuses on the development of the technology in low acceleration voltage,and finally introduces the algorithm’s application in EDS.

关 键 词：X射线能谱仪 硅漂移探测器 锂漂移硅探测器 低加速电压 多元成分分析 

分 类 号：O657[理学—分析化学]