基于木材上激光诱导石墨烯集成传感器的研究  

Integrated Sensor Based on Laser-Induced Graphene on Wood

作　　者：李晨 杨研伟 夏田[1] 叶晓慧 程光华 Li Chen;Yang Yanwei;Xia Tian;Ye Xiaohui;Cheng Guanghua(School of Mechanical and Electrical Engineering,Shaanxi Uuiversitiy of Science&Technology,Xi'an,Shaanxi 710021,China;School of Material Science atid Engitieering,Shaaiixi Uuiversitiy of Science&Technology,Xi’an,Shaanxi 710021,China;School of Electronics and Information,Northwestern Poly technical University,Xi’an,Shaayixi 710072,China)

机构地区：[1]陕西科技大学机电工程学院,陕西西安710021 [2]陕西科技大学材料科学与工程学院,陕西西安710021 [3]西北工业大学电子与信息学院,陕西西安710072

出　　处：《中国激光》2022年第2期45-55,共11页Chinese Journal of Lasers

基　　金：国家重点研究开发计划(2018YFB1107401);国家自然科学基金(61705124);中国博士后科学基金(2020M673382);陕西省自然科学基础研究计划(2019JQ-078);陕西大学青年创新团队;西安市科技计划项目(GXYD1.4);陕西科技大学博士研究基金(2016BJ-78)。

摘　　要：木材上激光诱导石墨烯具有环保可降解的优势,被广泛应用于智能木材建筑、家具、植物传感等领域。提出了一种利用木材制备绿色电子传感器的工艺方法,使用中心波长为1070 nm的光纤激光器将木材转化为含有石墨烯的多孔碳结构,方块电阻可达到8Ω·sq;。研究表明,激光将木材中的木质素、纤维素与半纤维素中的一部分转化为多孔碳(石墨烯),压力的变化使得纤维状多孔碳接触或者分离,温度的变化会影响石墨微晶的体积变化,这两者都会影响电阻的变化。制作了灵敏度系数为86.53的压力传感器与电阻温度系数为-0.101%的温度传感器,并制作了集成温度与压力的传感器,传感器满足生活中温度与压力的传感需求,具有广泛的应用前景。Objective Environmental protection and sustainable development have gradually become important, but the development inevitably brings some harmful waste, such as more and more discarded electronic products. These products contain a lot of heavy metals, which are difficult to recycle and become non-degradable, and it must be more expensive to recycle them. Measuring strain on wood generally requires an indirect measurement by pasting a metal foil gauge on its surface. This method not only has the transmission error caused by pasting, but also has the disadvantages of high cost, being difficult to recycle, and being non-degradable. Generally speaking, special instruments such as thermocouple thermometers and far-infrared thermometers are needed to measure the surface temperature, and the measurement cost is generally higher. At the same time, there are often multiple signal detection requirements in daily life, and thus the preparation of multifunctional sensors is of great significance. In this research, an integrated pressure and temperature sensor based on the laser-induced graphene(LIG) technology on wood is proposed, which can detect pressure and temperature signals at the same time and is a degradable green sensor.Methods Pine wood is chosen as the raw material for the experiment. The dried Pinus sylvestris wood strips are put into the vacuum chamber, and the vacuum degree in the vacuum chamber is controlled. The electronic pattern on the pine wood is processed by a fiber laser and a laser galvanometer controlled by software, and the electronic pattern is pre-designed through scanning mirror software. The defocus distance, vacuum chamber pressure, laser power, scanning speed, marking time, and laser frequency are controlled to explore the optimal parameters for preparing LIG. The scanning electron microscope(SEM), Raman spectroscopy, and infrared spectra are used to analyze the surface morphologies and chemical compositions of the samples. After the pressure and temperature sensors are successfully prepared,

关 键 词：激光技术 激光诱导石墨烯 压力传感器 温度传感器 绿色电子 木材 

分 类 号：V261.8[航空宇航科学与技术—航空宇航制造工程]