相位测量轮廓术中时空结合的三频相位展开  

Spatial-Temporal Combined Phase Unwrapping in Phase Measurement Profilometry

作　　者：侯艳丽 梁瀚钢 李付谦 陈文静[1] Hou Yanli;Liang Hangang;Li Fuqian;Chen Wenjing(College of Electronics and Information Engineering,Sichuan University,Chengdu,Sichuan 610065,China)

机构地区：[1]四川大学电子信息学院,四川成都610065

出　　处：《光学学报》2022年第1期167-175,共9页Acta Optica Sinica

基　　金：国家自然科学基金(62075143,U20A20215);国家重大仪器设备开发专项(2013YQ490879)。

摘　　要：提出了一种时空结合的三频时间相位展开方法,提高了三频时间相位展开方法的抑噪能力和相位展开的可靠度。在所提方法中,用灵敏度大于1的条纹代替传统三频时间相位展开法中灵敏度为1的条纹。通过计算这些条纹的截断相位,对其进行空间相位展开,并利用这些展开相位来指导其他两帧高灵敏度截断相位图的展开。与传统三频时间相位展开方法相比,在最高灵敏度条纹空间频率相同的情况下,所提方法缩小了三套条纹之间的频率倍数差,进而减小了噪声对相位展开的影响,提高了三频时间相位展开的可靠度和精度。A spatial-temporal combined phase unwrapping method is proposed, which improves the noise suppression ability and phase unwrapping reliability of the three-frequency temporal phase unwrapping method. The fringes with sensitivity greater than 1 are used to replace the fringes with sensitivity of 1 in the traditional three-frequency temporal phase unwrapping method. By calculating the wrapped phases of these fringes, the spatial phase unwrapping of them is carried out, and the unwrapped phases are used to guide the unwrapping of the other two high sensitivity wrapped phase images. Compared with the traditional three-frequency temporal phase unwrapping method, the proposed method reduces the frequency multiple difference between the three sets of fringes when the spatial frequencies of the highest sensitivity fringes of them are the same, thus reducing the influence of noise on phase unwrapping and improving the reliability and accuracy of three-frequency temporal phase unwrapping.

关 键 词：测量 三维面形测量 相位测量轮廓术 三频相位展开 时空相位展开 

分 类 号：O438[机械工程—光学工程]