Ultralow-loss compact silicon photonic waveguide spirals and delay lines  

作　　者：SHIHAN HONG LONG ZHANG YI WANG MING ZHANG YIWEI XIE DAOXIN DAI 

机构地区：[1]State Key Laboratory for Modern Optical Instrumentation,Center for Optical&Electromagnetic Research,College of Optical Science and Engineering,International Research Center for Advanced Photonics,Zhejiang University,Zijingang Campus,Hangzhou 310058,China [2]Ningbo Research Institute,Zhejiang University,Ningbo 315100,China

出　　处：《Photonics Research》2022年第1期1-7,共7页光子学研究（英文版）

基　　金：National Major Research and Development Program (2018YFB2200200, 2018YFB2200201);National Science Fund for Distinguished Young Scholars (61725503);National Natural Science Foundation of China(61961146003, 91950205);Zhejiang Provincial Major Research and Development Program (2021C01199);Zhejiang Provincial Natural Science Foundation(LD19F050001, LZ18F050001);Fundamental Research Funds for the Central Universities。

摘　　要：Low-loss and compact optical waveguides are key for realizing various photonic integrated circuits with long onchip delay lines,such as tunable optical delay lines,optical coherence tomography,and optical gyroscopes.In this paper,a low-loss and compact silicon photonic waveguide spiral is proposed by introducing broadened Archimedean spiral waveguides with a tapered Euler S-bend.A 100-cm-long waveguide spiral is realized with a minimal bending radius as small as 10 μm by using a standard 220-nm-thick silicon-on-insulator foundry process,and the measured propagation loss is as low as 0.28 dB/cm.Furthermore,the present waveguide spirals are used to realize a 10-bit tunable optical delay line,which has a footprint as small as 2.2 mm × 5.9 mm and a dynamic range of 5120 ps with a fine resolution of 10 ps.

关 键 词：WAVEGUIDE TUNABLE DELAY 

分 类 号：TN252[电子电信—物理电子学]