光学非球面超精密切削的在位测量及补偿加工  

On-machine measurement and compensation machining for ultra-precision cutting of optical aspheric surface

作　　者：张亮 郭曦鹏 王定文 徐闻 刘坚 黄帅[1] 尹韶辉[1] ZHANG Liang;GUO Xipeng;WANG Dingwen;XU Wen;LIU Jian;HUANG Shuai;YIN Shaohui(National Engineering Research Center for High Efficiency Grinding,Hunan University,Changsha 410082,China)

机构地区：[1]湖南大学,国家高效磨削工程技术研究中心,长沙410082

出　　处：《金刚石与磨料磨具工程》2022年第1期18-22,共5页Diamond & Abrasives Engineering

基　　金：国家重点研发计划(2017YFE0116900);国家自然科学基金(52130503);湖南省重点研发项目(2020WK2011)。

摘　　要：开发一种采用接触式测头与电容式位移传感器相结合的在位测量装置及非球面测量与补偿加工软件,进行C3604黄铜球面及非球面的单点金刚石超精密切削加工,并开展在位测量及补偿加工试验。补偿加工后,经在位测量系统测量,球面面形精度PV达到231.4 nm,非球面面形精度PV达到206.3 nm;与离线测量结果比对,结果分别相差3.0 nm和7.0 nm,验证了在位测量系统测量的精确性和补偿加工的有效性。An in-situ measurement device combining contact probe and capacitive displacement sensor is developed.An aspherical measurement and compensation machining software is also developed. The single point diamond ultra precision cutting experiments for C3604 brass spherical and aspherical surface are carried out. The in-situ measurement and compensation machining experiments are also carried out. After compensation machining, the spherical surface form accuracy PV reaches 231.4 nm, and the aspheric surface form accuracy PV reaches 206.3 nm. Compared with the off-line measurement results, the difference between the results is 3.0 nm, 7.0 nm respectively, the measuring accuracy of the in-situ measurement system and the validity of compensation machining are verified.

关 键 词：非球面 超精密加工 在位测量 补偿加工 

分 类 号：TG58[金属学及工艺—金属切削加工及机床] TQ164[化学工程—高温制品工业]