小波变换轮廓术测量精度影响因素的研究  

Study on the Influencing Factors of Measurement Accuracy of Wavelet Transform Profilometry

作　　者：杜连续 金永[1] DU Lianxu;JIN Yong(School of Information and Communication Engineering, North University of China, Taiyuan 030051,China)

机构地区：[1]中北大学信息与通信工程学院,山西太原030051

出　　处：《机械与电子》2022年第3期13-16,共4页Machinery & Electronics

基　　金：山西省自然科学基金(201901D111155)。

摘　　要：对影响小波变换轮廓术测量精度的部分因素进行了研究。首先,为了考察光栅频率和入射角对测量精度的影响,获得合适的光栅频率和入射角,对不同光栅频率和入射角下的半圆形轮廓进行了研究;然后,为了研究不同的小波母函数对相位提取精度的影响,使用不同的小波母函数对半圆形轮廓进行小波变换,分析不同的小波母函数对半圆形轮廓测量精度的影响;最后,通过对钢板进行重建验证,研究发现了决定小波变换轮廓术测量精度的一些因素,重建钢板的厚度误差不超过0.05 mm。Some factors that affect the accuracy of wavelet transform profilometry are studied.Firstly,the profiles under different grating frequencies and incident angles were investigated in order to examine the effects of grating frequency and incident angle on measurement precision.and obtain appropriate grating frequency and incidence Angle,the semicircle contour under different grating frequency andincidence Angle was studied.In addition,in order to study the influence of different wavelet generating functions on the precision of phase extraction,different wavelet generating functions are used to carry out wavelet transform on the semicircle contour,and the influence of different wavelet generating functions on the measurement precision of semicircle contour is analyzed.Finally,the above research was verified by the reconstruction of a steel plate.In this study,some factors determining the accuracy of the measurement of the wavelet profilometry were found.The thickness error of the reconstructed steel plate was less than 0.05 mm.

关 键 词：小波变换轮廓术 测量精度 小波母函数 

分 类 号：TH741[机械工程—光学工程] TP391.41[机械工程—仪器科学与技术]