间距可调的双模正方形微腔激光器(特邀)  

Dual-mode Square Microcavity Lasers with a Tunable Wavelength Interval(Invited)

作　　者：王婷 吴冀亮 马春光 黄勇涛 杨跃德[1,2] 肖金龙 黄永箴[1,2] WANG Ting;WU Jiliang;MA Chunguang;HUANG Yongtao;YANG Yuede;XIAO Jinlong;HUANG Yongzhen(State Key Laboratory of Integrated Optoelectronics,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China;Center of Materials Science and Optoelectronics Engineering,University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]中国科学院半导体研究所集成光电子学国家重点实验室,北京100083 [2]中国科学院大学材料科学与光电工程中心,北京100049

出　　处：《光子学报》2022年第2期21-28,共8页Acta Photonica Sinica

基　　金：国家自然科学基金(Nos.61874113,61935018)。

摘　　要：针对双波长激光器间距精细调谐的需求,基于正方形微腔的模场分布,设计了中心及四个角区电流注入窗口的正方形微腔激光器。利用有限元法对提出的结构进行分析,发现改变腔体折射率分布差,可以调控基横模和一阶横模的波长间距。基于半导体平面加工工艺成功制备了边长为30μm的非均匀注入正方形微腔激光器。当注入电流从42 mA增加到53 mA时,该激光器的波长间隔从0.18 nm减小到0.1 nm,强度比小于4 dB。除此之外,继续增加电流,由于双模间隔的进一步减小,出现了明显的单周期振荡现象。In recent years,dual-wavelength lasers are used in a wide variety of applications in interferometric measurement,optical communications,microwave and THz wave generations,and optical frequency combs.A variety of methods to realize dual-wavelength lasers have been proposed,including fiber lasers,Y-branch integrated lasers,and two-section Distributed Feedback(DFB)or Distributed Bragg Reflection(DBR)lasers.In addition,the whispering gallery mode microcavity laser has great application potential in photonic integration due to its small mode volume,high-quality factor,and simple manufacturing process.In this paper,we design and fabricate a square microcavity laser with a current injection window in the center and four corners to achieve tunable dual-wavelength lasing.By simply changing the injection current,we realize dual-mode lasing with a wavelength interval tuned from 0.18 nm to 0.1 nm,and an intensity ratio less than 4 d B.A two-dimensional finite-element method is used to simulate the TE modes of the square microcavity.It can be seen that along the lines connecting the midpoints of the adjacent sides,the fundamental mode and the first-order mode show the strong field and the weak field distribution,respectively.Due to the incomplete overlap of the mode field distributions,there is less mode competition between the fundamental mode and the first-order mode,and the quality factors are 6.994×104and1.838×104,respectively.Taking into account the vertical radiation,material absorption,and manufacturing process losses,the two modes have similar quality factors to achieve dual-mode lasing.Based on the mode field distribution,a deformed square microcavity laser is designed with a current injection window in the center and four corners,which induces a refractive index step.For a square microcavity with a side length of 30μm,the numerical result shows that the mode wavelength interval can be reduced from 1.07 nm to 0.11 nm when the refractive index step increases from-0.005 to 0.003.Next,a dual-mode square microcavity l

关 键 词：激光器 半导体激光器 微腔 双波长 正方形谐振腔 

分 类 号：TN248.4[电子电信—物理电子学]