Ni5Pt合金再结晶行为的EBSD研究  

EBSD Study on Recrystallization Behavior of Ni5Pt Alloy

作　　者：王一晴[1] 闻明[1] 郭俊梅[1] 肖柱[2] 甘建壮[1] 王传军[1] 谭志龙[1] 管伟明[1] Wang Yiqing;Wen Ming;Guo Junmei;Xiao Zhu;Gan Jianzhuang;Wang Chuanjun;Tan Zhilong;Guan Weiming(State Key Laboratory of Advanced Technologies for Comprehensive Utilization of Platinum Metals,Kunming Institute of Precious Metals,Kunming 650106,China;School of Materials Science and Engineering,Central South University,Changsha 410083,China)

机构地区：[1]昆明贵金属研究所,稀贵金属综合利用新技术国家重点实验室,云南昆明650106 [2]中南大学材料科学与工程学院,湖南长沙410083

出　　处：《稀有金属材料与工程》2022年第1期127-133,共7页Rare Metal Materials and Engineering

基　　金：国家重点研发计划项目(2017YFB0305503);云南省国际合作计划项目(2014IA037);云南省基金青年项目(201701YE00059);云南省创新团队项目(2019HC024)。

摘　　要：NiPt合金溅射靶材是半导体工业重要原材料,其微观结构的表征和调控对于提高靶材与溅射薄膜的质量具有重要意义。采用EBSD分析检测系统对冷轧态Ni5Pt合金在退火过程中的再结晶行为进行了研究。结果表明,Ni5Pt合金经80%冷轧变形后主要呈{112}<021>织构。450℃退火后,最先在<110>∥ND形变带以亚晶合并机制形核。550~650℃温度范围内退火后再结晶结构平均晶粒尺寸由1.2μm增至15μm,取向分布呈<110>∥ND趋势,大角度晶界(HABS)和小角度晶界(LABS)的演变主导了Ni5Pt合金退火过程中结构的变化。550℃退火晶粒的生长机制主要是晶粒转动合并机制。而650℃退火后,晶粒内部大量亚晶及60°{111}退火孪晶的出现分别证明了该温度范围内有晶粒转动和晶界迁移2种生长机制的共同作用。Nickel-platinum(NiPt) alloy sputtering target is an important raw material in semiconductor industry. Its microstructure characterization and adjustment are of great significance to improve the quality of target and sputtering film. The recrystallization behavior of cold rolled Ni5 Pt alloy during annealing treatment was investigated by electron backscatter diffraction(EBSD) analysis system. The results show that the major orientation of cold rolled 80% Ni5 Pt alloy is {112}<021> texture. After annealing at 450 ℃, the grain nucleation occurs firstly at the deformation zone of <110>∥ND with sub-grain coalescence mechanism. For samples annealed between 550 ℃ and 650 ℃, the average grain size of recrystallized grain structure increases from 1.2 μm to 15 μm and the orientation distribution tends to <110>∥ND. And the evolution of HABS and LABS dominates the structure evolution of Ni5 Pt alloy. For sample annealed at 550 ℃, the main grain growth mechanism is grain rotation and coalescence. For sample annealed at 650 ℃, the appearance of a large number of sub-grains and 60°{111} annealing twins suggest the co-existence of grain rotation and grain boundary migration mechanism, respectively.

关 键 词：镍铂合金 再结晶 晶界 EBSD 晶体取向 

分 类 号：TG146.15[一般工业技术—材料科学与工程]