多晶硅中甲基氯硅烷转化研究  

Research of the distribution and transformation of methylchlorosilane in polycrystalline silicon

作　　者：王芳 杨典 孙强 万烨[1,2] 张晓伟 付强[1] WANG Fang;YANG Dian;SUN Qiang;WAN Ye;ZHANG Xiao-wei;FU Qiang(China Silion Corpration Ltd.,Luoyang 471023,China;China ENFI Engineering Corporation,Beijing 100038,China)

机构地区：[1]洛阳中硅高科技有限公司,河南洛阳471023 [2]中国恩菲工程技术有限公司,北京100038

出　　处：《中国有色冶金》2022年第1期49-53,共5页China Nonferrous Metallurgy

摘　　要：三氯氢硅中的甲基氯硅烷是造成多晶硅碳杂质超标的重要原因,为了深度去除氯硅烷中的甲基氯硅烷,本文通过对三氯氢硅氢还原法各工序中的甲基氯硅烷含量进行检测和分析,研究甲基氯硅烷杂质的转化规律,得出以下结论:在氢化系统中,甲基二氯硅烷和甲基三氯硅烷存在转化平衡关系,甲基二氯硅烷经氢化系统后出口平衡浓度在7μg/g附近;在还原系统中,甲基二氯硅烷会转化成甲基三氯硅烷,根据进出物流甲基二氯硅烷含量对比相对转化量基本一致;在反歧化系统,甲基氯硅烷不会发生转化,可以推断甲基氯硅烷需要在适当的温度和压力下才会发生转化;提纯系统是甲基氯硅烷组分的转移分离过程,适当组织提纯塔对甲基氯硅烷分布提纯,有利于三氯氢硅中甲基二氯硅烷的净化。Methylchlorosilane in trichlorosilane is an important cause of excessive carbon impurities in polysilicon. In order to deeply remove methylchlorosilane in chlorosilane, this paper detects and analyzes the content of methylchlorosilane in each process of trichlorosilane hydrogen reduction method, and studies the conversionrules of methylchlorosilane impurities. The results show that there is a conversion equilibrium relationship between MDCSand MTCS in the hydrogenation system;In the reduction system, MDCS will be converted into MTCS, and the relative conversion amount is basically the same according to the content of MDCS in the incoming and outgoing streams;in the anti disproportionation system, methylchlorosilane will not be converted, and it can be inferred that methylchlorosilane needs to be converted under appropriate temperature and pressure;the purification system is the transfer and separation process of methylchlorosilane components, and properly organizing the purification tower to purify the methylchlorosilane is beneficial to the convertion of MDCS in TCS.

关 键 词：高纯多晶硅 氢还原法 碳杂质含量 三氯氢硅(TCS) 甲基二氯硅烷(MDCS) 甲基三氯硅烷(MTCS) 转化规律 三氯氢硅回收率 

分 类 号：TQ127.2[化学工程—无机化工]