抛物非球面零位干涉检测的补偿器设计  

Design of compensator for parabolic aspheric surface zero interference detection

作　　者：闫钧华[1,2] 胡子佳 朱德燕 陈阳 张寅[1,2] 范君杰 YAN Junhua;HU Zijia;ZHU Deyan;CHEN Yang;ZHANG Yin;FAN Junjie(Key Laboratory of Space Photoelectric Detection and Perception,Ministry of Industry and Information Technology,Nanjing University of Aeronautics and Astronautics,Nanjing 211106,China;College of Astronautics,Nanjing University of Aeronautics and Astronautics,Nanjing 211106,China)

机构地区：[1]南京航空航天大学空间光电探测与感知工业和信息化部重点实验室,江苏南京211106 [2]南京航空航天大学航天学院,江苏南京211106

出　　处：《电子设计工程》2022年第6期66-70,75,共6页Electronic Design Engineering

基　　金：南京航空航天大学空间光电探测与感知工业和信息化部重点实验室开放课题资助(NJ2020021-7);中央高校基本科研业务费资助(NJ2020021)。

摘　　要：非球面因具有自由度多、像差校正能力强等优点,已作为一种更优良的面型广泛应用于航天、遥感等领域的载荷系统中。达到高精度检测要求的非球面可以在光电检测领域广泛使用,为此设计了针对口径800 mm,曲率半径1 400 mm的抛物非球面补偿器。基于像差理论计算了补偿器初始结构,并在Zemax中采用逆向设计的方法建立初始结构。结构优化后得到了设计结果PV=0.014 8λ,RMS=0.003 6λ,相关设计结果满足PV<0.25λ,RMS<0.02λ的高精度检测要求。根据所设计的补偿器结构进行公差分析,结果表明设计的补偿器可用于实际加工。Due to aspherical surface has many advantages such as many degrees of freedom and strong aberration correction ability,it has been widely used in load systems in aerospace,remote sensing and other fields as a better surface. The aspheric surface that meets the requirements of high-precision detection can be widely used in the field of photoelectric detection. For this purpose,a parabolic aspheric surface compensator with a diameter of 800 mm and a radius of curvature of 1 400 mm is designed. The initial structure of the compensator is calculated based on the aberration theory,and the initial structure is established in Zemax using the reverse design method. After system optimization,the design results PV=0.014 8λ,RMS=0.003 6λ is obtained,and the relevant design results meet the high-precision detection requirements of PV<0.25λ and RMS<0.02λ. The tolerance analysis is carried out according to the designed compensator structure,and the results show that the designed compensator can be used in actual processing.

关 键 词：非球面 Offner型补偿器 高精度 公差分析 

分 类 号：TN06[电子电信—物理电子学]