机床线性轴多自由度运动误差在线测量方法  

On-Machine Measurement Method for Multi-Degree-of-Freedom Motion Error of Linear Stage of Machine Tool

作　　者：蔡引娣 高英豪 王路辉 范光照 CAI Yindi;GAO Yinghao;WANG Luhui;FAN Guangzhao(Dalian University of Technology,Dalian 116024,China)

机构地区：[1]大连理工大学,大连116024

出　　处：《航空制造技术》2022年第5期55-62,共8页Aeronautical Manufacturing Technology

基　　金：国家自然科学基金(51905078);国家重点研发计划项目“制造基础技术与关键部件”重点专项(2018YFB2001400)。

摘　　要：激光多自由度误差测量方法常被用于测量机床运动误差。半导体激光器由于体积小、成本低等优点,常被作为激光多自由度误差测量系统的光源。但是,大气扰动和测量系统的变形将导致半导体激光器的出射光束产生漂移,影响测量系统的稳定性。同时,由于半导体激光器的发光特点,其光斑常为椭圆形,从而制约了以半导体激光器为光源的激光多自由度误差测量系统的测量精度。因此,提出了基于双反射镜的光束漂移自动抑制方法,对半导体激光的光束漂移进行实时测量和补偿;同时提出了光束整形方法,在不加入其他光学元件的同时,修正半导体激光器的光斑形貌。在此基础上,设计并搭建了半导体激光多自由度运动误差测量系统。通过试验可得,测量系统水平直线度误差信号、竖直直线度误差信号、偏摆角误差信号和俯仰角误差信号的稳定性由光束漂移抑制前的6.9μm、6.7μm、5.4arcsec和4.6arcsec提高到光束漂移抑制后的5.5μm、2.5μm、1.3arcsec和1.7arcsec;直线度误差测量精度优于1.9μm,角度误差测量精度优于1.6arcsec。The laser multi-degree-of-freedom(MDOF)error measurement methods are widely used for measuring motion errors of machine tools.Since a laser diode has the advantage of small size and low cost,it is always adopted as the laser source of the laser MDOF error measurement system.However,the stability of the laser MDOF error measurement system will be influenced by the laser beam drifts,which are caused by the atmospheric distribution and the deformation of the optical elements and its holders.In addition,the beam spot of the laser diode is elliptical,which will influence the accuracy of the laser MDOF error measurement system.Therefore,a laser beam drifts compensation method is proposed to reduce the effects of the laser beam drifts on the measurement accuracy of the system.In the meantime,a beam shaping method is proposed to shape the laser diode spot.A laser diode-based MDOF error measurement system is conducted according to the measurement principle,the compensation principle and the beam shaping principle.It is verified that the stabilities of the horizontal and vertical straightness signals and the pitch and yaw angular signals are improved to be 5.5μm,2.5μm,1.3arcsec and 1.7arcsec with the laser beam drifts compensation from 6.9μm,6.7μm,5.4arcsec and 4.6arcsec without the laser beam drifts compensation.The measurement accuracy of the designed measurement system for measuring the straightness errors and the angular errors are better than 1.9μm and 1.6arcsec.

关 键 词：运动误差 多自由度误差 半导体激光器 光束漂移 光斑形变 

分 类 号：TG806[金属学及工艺—公差测量技术] TG659