基于电磁模型的大气压表面波等离子体数值模拟  

Numerical Modelling of Surface-Wave Plasma Discharges at Atmospheric Pressure by Electromagnetic Model

作　　者：陈传杰 孔维宾[1,2] 方忠庆 王媛媛[1,2] 樊永胜[3] 周锋[1,2] 王如刚[1,2] CHEN Chuanjie;KONG Weibin;FANG Zhongqing;WANG Yuanyuan;FAN Yongsheng;ZHOU Feng;WANG Rugang(School of Information Engineering,Yancheng Institute of Technology,Yancheng Jiangsu 224051;Research Center of Photoelectric and Information Technology,Yancheng Institute of Technology,Yancheng Jiangsu 224051;School of Automotive Engineering,Yancheng Institute of Technology,Yancheng Jiangsu 224051)

机构地区：[1]盐城工学院信息工程学院,江苏盐城224051 [2]盐城工学院光电信息技术研究所,江苏盐城224051 [3]盐城工学院汽车工程学院,江苏盐城224051

出　　处：《电子科技大学学报》2022年第2期305-313,共9页Journal of University of Electronic Science and Technology of China

基　　金：国家自然科学基金(51806186);江苏省高等学校自然科学研究面上项目(20KJB140025,19KJB510061)。

摘　　要：针对表面波等离子体模拟复杂程度高和计算工作量大的问题,提出基于电磁模型来开展大气压等离子体的数值模拟。根据表面波等离子体的放电特性,合理建立和简化电磁模型。通过对比实验诊断与数值计算结果,验证了模型的可靠性及其参数适用范围,拟合得到的电子有效碰撞频率((1.5±0.25)×10^(11)s^(−1))与实验测量值吻合。在此基础上,重点考察了外部控制参数(介电常数、激励频率(2.45 GHz和915 MHz)、放电管几何尺寸(壁厚和内径))对等离子体密度和电磁参数(电场分布和传播常数)等的影响。结果表明,电子密度及其轴向梯度随着介电常数、激励频率和壁厚的增加而增大,而随着内径增大而减小。在电场分布上,维持等离子体的电场主要是表面波的轴向分量E_(z)。随着微波激励频率的降低,表面波在等离子体内的趋肤深度增加,E_(z)的径向分布变得更加均匀。表面波的衰减常数α和相位常数β随介电常数和壁厚的增加略微增大,而随频率和内径的增加显著减小。模拟结果定性分析了实验放电参数与外部控制参数的关联性。In this work,we proposed the electromagnetic model to solve the numerical modelling of the surface wave plasma discharges at atmospheric pressure due to the complexity and vast computing of the common models.According to the discharge characteristics of atmospheric pressure surface-wave plasma,the electromagnetic model was established and simplified reasonably.The results obtained by experimental diagnosis and numerical calculation were compared to verify the reliability of the model and the applicable range of parameters.The effective electron collision frequency obtained by fitting to the experimental data is(1.5±0.25)×10^(11)s^(−1),which matches the measured values reported by others.On this foundation,we put emphasis on the influences of plasma density and electromagnetic parameters(electric field distribution and propagation constant)on the external controlling parameters,such as dielectric constant,excitation frequency of 2.45 GHz and 915 MHz,and geometry size of discharge tube(tube thickness and inner radius).The results showed that the electron density and its axial gradient increase with the increasing of the dielectric constant,excitation frequency and tube thickness,but decrease with the tube inner diameter.With regard to the distribution of electric field,the maintenance of plasma is due to the axial component of electric field.As the increase of excitation frequency,the skin depth of surface wave in the media of plasma increases and the radial profile of E_(z) becomes more uniform.The attenuation and phase constants increase slightly with the dielectric constant and tube thickness,but decrease with the excitation frequency and inner diameter.Simulation results could be used to analyze qualitatively the correlation of the plasma parameters and external controlling parameters.

关 键 词：大气压等离子体放电 电磁模型 数值模拟 表面波 

分 类 号：TM15[电气工程—电工理论与新技术] O053[理学]